Grid surface conditioning for ion beam system
An in situ cleansing of grids of an ion beam system, such as a deposition and/or etching system, that includes applying a negative bias on the downstream-most grid and etching redeposited material from the grid. Any or all of the chamber pressure of the system, the extraction current in the ion beam source, the beam divergence, and perveance can be adjusted with the deceleration grid bias. The methods of this disclosure can be applied to any gridded ion source systems, including those with an assist ion beam.
1 . A method of conditioning a grid in an ion beam system, the method comprising:
applying a negative bias to a downstream-most grid in the ion beam system;
providing a broad and defocused ion beam through the negative biased downstream-most grid; and
etching redeposited material off of the downstream-most grid.
2 . The method of claim 1 further comprising one or more of:
adjusting a pressure of a chamber of the ion beam system;
adjusting an extraction current of the ion beam system;
adjusting R value of the ion beam system; and
adjusting perveance of the ion beam system.
3 . The method of claim 2 , wherein the adjusting a pressure of a chamber of the ion beam system comprises increasing the pressure.
4 . The method of claim 2 , wherein the adjusting an extraction current of the ion beam system comprises increasing the extraction current.
5 . The method of claim 2 , wherein the adjusting R value of the ion beam system comprises increasing the R value.
6 . The method of claim 2 , wherein the adjusting perveance of the ion beam system comprises increasing the perveance.
7 . The method of claim 2 , wherein the adjusting a pressure of a chamber of the ion beam system comprises decreasing the pressure.
8 . The method of claim 2 , wherein the adjusting an extraction current of the ion beam system comprises decreasing the extraction current.
9 . The method of claim 2 , wherein the adjusting R value of the ion beam system comprises decreasing the R value.
10 . The method of claim 2 , wherein the adjusting perveance of the ion beam system comprises decreasing the perveance.
11 . The method of claim 1 , wherein applying a negative bias comprises applying a negative voltage of between 50V and 800V for at least 30 seconds.
12 . The method of claim 11 , wherein applying a negative voltage is for up to 180 minutes.
13 . The method of claim 1 , wherein the method is done between substrate processing without opening the ion beam system.
14 . The method of claim 1 , wherein the method is done without removing the downstream-most grid from the ion beam system.
15 . A method of in situ conditioning a grid in a chamber of an ion beam system after processing a substrate, the method at a chamber pressure, at an extraction current, at an R value, at a perveance, and comprising:
applying a negative bias to a downstream-most grid in the ion beam system;
adjusting one or more of the chamber pressure, the extraction current, the R value, and the perveance; and
providing an ion beam through the negative biased downstream-most grid.
16 . The method of claim 15 , further comprising etching redeposited material off of the grid.
17 . The method of claim 15 , wherein providing an ion beam through the negative biased grid comprises providing a broad and defocused ion beam.
18 . The method of claim 15 , wherein applying a negative bias comprises applying a negative voltage of between 50V and 800V for at least 30 seconds.
19 . The method of claim 18 , wherein applying a negative voltage is for up to 180 minutes.
20 . A method for positioning multiple grids in an ion beam system, the multiple grids having a plurality of holes therethrough and located between an ion beam source and a target, the method comprising:
applying a negative bias to a downstream-most grid in the ion beam system, the downstream-most grid closest to the target;
providing an ion beam through the negative biased grid to condition the negative biased grid and produce a hexagon pattern on a surface of the conditioned negative biased grid; and
determining if centers of the plurality of holes in the conditioned negative biased grid are aligned with centers of hexagons of the hexagon pattern.
21 . The method of claim 20 , further comprising:
dependent upon determining the centers of the plurality of holes are not aligned with the centers of the hexagons, adjusting a position of at least one of the multiple grids.