MEMS device with a connecting element
A MEMS device for generating sound and/or detecting sound includes a diaphragm that is deflectable along a stroke axis and a MEMS unit. The MEMS unit includes at least one cantilever arm for generating and/or detecting a stroke motion of the diaphragm and which is spaced apart from the diaphragm along the stroke axis such that a cavity is formed between the cantilever arm and the diaphragm. The MEMs unit also includes a stroke structure arranged in the cavity and connected to the diaphragm, and a connecting element that movably connects the cantilever arm to the stroke structure. The connecting element narrows and/or widens in at least one area in the direction of the stroke structure, and/or has at least one recess.
1 . A MEMS device for generating sound and/or detecting sound, the MEMS device comprising:
a diaphragm deflectable along a stroke axis; and
a MEMS unit comprising:
at least one cantilever arm configured to generate and/or detect a stoke motion of the diaphragm, the at least one cantilever arm being spaced apart from the diaphragm along the stroke axis such that a cavity is formed between the at least one cantilever arm and the diaphragm;
a stroke structure arranged in the cavity and being connected to the diaphragm; and
a connecting element that movably connects the at least one cantilever arm to the stroke structure;
wherein:
the connecting element narrows in at least one area and widens in at least one area in the direction of the stroke structure;
the connecting element includes a first cantilever section and a second cantilever section, which are spaced apart from one another in the longitudinal direction of the connecting element;
the connecting element includes a bridging section which is formed between the first cantilever section and the second cantilever section; and
the first cantilever section and the second cantilever section are connected to one another via the bridging section.
2 . The MEMS device of claim 1 , wherein the connecting element comprises a single connecting element, the at least one cantilever arm being connected to the stroke structure via only the single connecting element, and wherein both of the first cantilever section and the second cantilever section have two opposite cantilevers.
3 . The MEMS device of claim 1 , wherein two opposite longitudinal sides of the connecting element and/or a basic shape of the connecting element taper(s) in the shape of a trapezoid in the direction of the stroke structure.
4 . The MEMS device of claim 1 , wherein the connecting element includes two opposite longitudinal sides and further includes at least one cantilever section in which the connecting element has at least one cantilever, the at least one cantilever extending in a transverse direction of the connecting element toward one of the two opposite longitudinal sides of the connecting element.
5 . The MEMS device of claim 4 , wherein the at least one cantilever comprises first and second cantilevers situated opposite one another and wherein the two opposite longitudinal sides of the connecting element comprise first and second longitudinal sides of the connecting element, wherein the first cantilever extends toward the first longitudinal side of the connecting element and the second cantilever extends toward the second longitudinal side of the connecting element.
6 . The MEMS device of claim 5 , wherein the connecting element has the at least one recess, the at least one recess extending completely through the connecting element in the direction of the stroke axis;
wherein:
the at least one recess is closed in the shape of a ring in its circumferential direction; and/or
the at least one recess is arranged in the at least one cantilever section and extends into at least one of the first cantilever or the second cantilever.
7 . The MEMS device of claim 1 , wherein the connecting element is connected to the at least one cantilever arm via a single, first contact area extending in a transverse direction of the at least one cantilever arm.
8 . The MEMS device of claim 7 , wherein the at least one cantilever arm has a free cantilever-arm-end facing away from a carrier of the MEMS unit; and
the first contact area is arranged on the free cantilever-arm-end and/or is narrower than the free cantilever-arm-end in the transverse direction of the at least one cantilever arm.
9 . The MEMS device of claim 7 , wherein the connecting element is connected to the stroke structure via a single, second contact area extending in the transverse direction of the at least one cantilever arm.
10 . The MEMS device of claim 9 , wherein the first contact area is wider than the second contact area in the transverse direction of the at least one cantilever arm.
11 . The MEMS device of claim 9 , wherein the connecting element includes at least one cantilever section in which the connecting element has at least one cantilever, the at least one cantilever extending in a transverse direction of the connecting element toward one of two opposite longitudinal sides of the connecting element;
wherein the connecting element includes at least one bridging section that connects the at least one cantilever section to at least one of the first contact area, the second contact area, or an adjacent further cantilever section.
12 . The MEMS device of claim 11 , wherein the at least one bridging section is arranged centrally in the transverse direction of the connecting element and/or has a smaller width in comparison with the at least one cantilever section.
13 . The MEMS device of claim 11 , wherein the at least one bridging section has at least one lateral incision that extends from one of the two opposite longitudinal sides of the connecting element into the connecting element.
14 . The MEMS device of claim 1 , wherein the connecting element has a fir tree basic shape, and/or
the connecting element includes multiple cantilever sections spaced apart from one another in a longitudinal direction of the connecting element, at least one of the multiple cantilever sections having at least one cantilever extending in a transverse direction of the connecting element toward one of two opposite longitudinal sides of the connecting element.
15 . The MEMS device of claim 14 , wherein the multiple cantilever sections have a smaller width with respect to one another as the connection section extends radially from the at least one cantilever arm towards the stroke structure.
16 . The MEMS device of claim 1 , wherein the at least one cantilever arm has a trapezoidal shape which tapers in the direction of the stroke structure, the connecting element continuing this trapezoidal shape in the direction of the stroke structure.
17 . The MEMS device of claim 1 , wherein the at least one cantilever arm comprises multiple cantilever arms and wherein the connecting arm comprises one connecting arm of multiple connecting arms, each cantilever arm of the multiple cantilever arms being connected to the stroke structure via a respective single connecting element of the multiple connecting elements.
18 . An electronic device having a MEMS device according to claim 1 .
19 . The MEMS device of claim 1 , wherein the connecting element includes at least one cantilever section in which the connecting element has at least one cantilever, the at least one cantilever extending in a transverse direction of the connecting element toward one of two opposite longitudinal sides of the connecting element;
wherein the connecting element includes at least one bridging section that connects the at least one cantilever section to an adjacent further cantilever section.
20 . A MEMS unit comprising:
at least one cantilever arm for generating and/or detecting a stroke motion of a diaphragm;
a stroke structure configured to be connected to the diaphragm; and
a connecting element that movably connects the cantilever arm to the stroke structure,
wherein:
the connecting element narrows and widens at least in one section in the direction of the stroke structure;
the connecting element includes a first cantilever section and a second cantilever section, which are spaced apart from one another in the longitudinal direction of the connecting element;
the connecting element includes a bridging section which is formed between the first cantilever section and the second cantilever section; and
the first cantilever section and the second cantilever section are connected to one another via the bridging section.