Method for manufacturing a sensor comprising at least two separate electrodes, and sensor
A process for manufacturing a sensor including at least two electrodes, including providing a flexible dielectric substrate having a layer of electrically conductive material on at least one of its sides. The electrodes, conductive connecting tracks and a common current supply track are etched in the layer of electrically conductive material. The process further includes electrodepositing one or more layers on the two electrodes and a step of selectively depositing, electrochemically, on at least one electrode, at least one layer of a material different from the one or more materials already deposited on another electrode.
1. A process for manufacturing a sensor comprising at least two electrodes, the process comprising the following steps:
a) providing a flexible dielectric substrate with two main sides, called the front side and back side respectively, the front side being at least partially covered with a layer of a first electrically conductive material,
b) etching, in the layer of the first material, at least a first electrode and a second electrode, and at least first and second connecting tracks that are conductive and each respectively connected to a common current supply track, each of these first and second connecting tracks being connected to the first electrode and to the second electrode, respectively,
c) electrodepositing at least one conductive material on at least the first electrode,
d) a step of selectively depositing, electrochemically, on the second electrode, at least one layer of a material different from the one or more materials deposited on the first electrode in step c),
characterized in that step d) comprises a disconnecting step d′) consisting in electrically isolating at least the first electrode from the common current supply track, the second electrode remaining electrically connected to the common current supply track, and, after the disconnecting step d′), at least one step d″) of forming, electrochemically, on the second electrode, at least one layer of a material different from the one or more materials deposited on the first electrode in step c).
2. The process as claimed in claim 1 , wherein said at least one layer of a material different from the one or more materials deposited on the first electrode in step c) is a layer of polyaniline.
3. The process as claimed in claim 1 , wherein said at least one layer of a material different from the one or more materials deposited on the first electrode in step c) is a layer of gold.
4. The process as claimed in claim 1 , wherein the first electrically conductive material at least partially covering the front side of the substrate is formed from a metal layer laminated on the substrate, this metal layer comprising one of the following metals, or an alloy thereof: copper, aluminum, steel.
5. The process as claimed in claim 1 , wherein a second electrically conductive material at least partially covering the back side of the substrate is formed from a metal layer laminated on the substrate, this metal layer comprising one of the following metals, or an alloy thereof: copper, aluminum, steel.
6. The process as claimed in claim 5 , wherein the first electrode and the second electrode are produced on the front side, and electrically conductive connecting tracks are formed on the back side.
7. The process as claimed in claim 5 , wherein conductive vias are produced through the substrate to connect the electrodes to the common current supply track by way of the connecting tracks.
8. The process as claimed in claim 1 , wherein, in step c), electrodepositing at least one material on at least the first electrode comprises depositing at least one layer of a metal selected from the list containing nickel, gold, silver, copper, platinum, and palladium.
9. The process as claimed in claim 1 , comprising etching, in the layer of the first material, a third electrode and depositing, on this third electrode, at least one layer of a metal selected from the list containing nickel, gold, silver, copper, platinum, and palladium.
10. The process as claimed in claim 1 , comprising a step, subsequent to step c), of depositing, on the first electrode, a layer of silver chloride or of carbon using a technique selected from the list containing screen printing, jet printing and electrodeposition.
11. The process as claimed in claim 1 , comprising a step of selective masking during at least one electrodeposition of a material on at least one of the electrodes.
12. An electrical circuit for a measurement sensor comprising at least two electrodes, this electrical circuit comprising
a) a flexible dielectric substrate with two main sides, called the front side and back side respectively,
b) at least first and second electrodes produced in a layer of a first electrically conductive material, which layer is borne by the front side, and at least first and second conductive connecting tracks each connected, on the one hand, to the first electrode and to the second electrode, respectively, and on the other hand, to current supply tracks,
characterized in that the second electrode is at least partially covered with at least one layer of a material different from the one or more materials deposited on the first electrode, the first electrode being disconnected from the current supply tracks and the second electrode being connected to the current supply tracks.
13. The electrical circuit as claimed in claim 12 , wherein said at least one layer of a material different from the one or more materials deposited on the first electrode is a layer of polyaniline.
14. The electrical circuit as claimed in claim 13 , wherein the layer of polyaniline has a structure corresponding to a layer formed using an electrochemical process.
15. The electrical circuit as claimed in claim 12 , wherein the first electrode and the second electrode comprise the same stack of layers electrodeposited on the layer of first electrically conductive material, this stack being at least partially covered with a layer of silver chloride on the first electrode and with the layer of polyaniline on the second electrode.