APPARATUS FOR PRODUCING ALN WHISKERS
A method and apparatus for producing AlN whiskers includes reduced incorporation of metal particles, an AlN whisker body, AlN whiskers, a resin molded body, and a method for producing the resin molded body. The method for producing AlN whiskers includes heating an Al-containing material in a material accommodation unit to thereby generate Al gas; and introducing the Al gas into a reaction chamber through a communication portion while introducing nitrogen gas into the reaction chamber through a gas inlet port, to thereby grow AlN whiskers on the surface of an Al 2 O 3 substrate placed in the reaction chamber.
1 . An apparatus for producing AlN whiskers, characterized in that the apparatus comprises a material accommodation unit for accommodating an Al-containing material;
a reaction chamber for growing AlN whiskers; and
a first heating unit for heating at least the material accommodation unit, wherein the reaction chamber comprises one or more species of insulating substrates;
the first heating unit heats the Al-containing material accommodated in the material accommodation unit; and
the production apparatus comprises one or more communication portions that communicate between the material accommodation unit and the reaction chamber.
2 . An apparatus for producing AlN whiskers according to claim 1 , wherein
the first heating unit heats the reaction chamber.
3 . An apparatus for producing AlN whiskers according to claim 1 ,
which further comprises a second heating unit for heating the reaction chamber.
4 . An apparatus for producing AlN whiskers according to claim 1 ,
which further comprises an openable and closable unit for switching the open state and the closed state of an opening(s) of the one or more communication portions.
5 . An apparatus for producing AlN whiskers according to claim 1 , wherein
the material accommodation unit is disposed vertically below the reaction chamber.
6 . An apparatus for producing AlN whiskers according to claim 2 , wherein
the material accommodation unit is disposed vertically below the reaction chamber.
7 . An apparatus for producing AlN whiskers according to claim 4 , wherein
the material accommodation unit is disposed vertically below the reaction chamber.