IP Library Granted Patent US 12,298,540
Granted Patent B2
US 12,298,540 · App. 18/601,712 · Granted May 13, 2025

Plasma dispersion effect for metasurface tuning

Inventors: Aditya Jain (Minneapolis, MN); Zoran Jandric (Minneapolis, MN); Dan Mohr (St. Paul, MN); Kevin A. Gomez (Eden Prairie, MN); Krishnan Subramanian (Shakopee, MN)
Assignee: LUMINAR TECHNOLOGIES, INC.
G02B5/008G01S7/481G01S7/4814G01S7/4817G02B1/002G02B1/007G02B6/1226G02B27/0087G02F1/292G02F1/3133G02F2202/30
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 12,298,540
App. No.
18/601,712
Granted
May 13, 2025
Kind
B2
Abstract

An active metasurface that provides low-loss and high-bandwidth modulation control of light includes a number of cells arranged on a substrate. A controller dynamically alters a voltage differential supplied to the electrodes of each of the cells is adapted to alter refractive index of each of the high-index dielectric blocks in order to controllably steer light exiting the cell.

Claims (29)

1. A device, comprising:

a metasurface comprising a number of cells arranged on a substrate, each of the cells including:

a high-index dielectric block including an interface between a positively-doped material and a negatively-doped material; and

electrodes configured to provide a voltage differential across the high-index dielectric block to flow current along a current path that passes through the high-index dielectric block, at least a portion of the current path being substantially parallel to a plane defined by the metasurface.

2. The device of claim 1 , wherein each of the cells has dimensions that provide a Mie resonance mode to enhance an electric field component of light of a target wavelength.

3. The device of claim 1 , wherein each of the cells is doped to have a positive charge density that increases in a first direction of the cell and a negative charge density that increases in a second opposite direction of the cell.

4. The device of claim 3 , wherein the positive charge density and the negative charge density vary in a direction that is generally parallel to the plane defined by the metasurface.

5. The device of claim 1 , further comprising a controller that dynamically alters a voltage differential supplied to the electrodes of each of the cells to alter a refractive index of each of the high-index dielectric blocks in order to controllably steer light exiting the cell.

6. The device of claim 5 , wherein the cell is reverse biased such that the controller applies a positive voltage to a first electrode in contact with a negatively-doped region and a negative voltage to a second electrode that is in contact with a positively-doped region.

7. The device of claim 1 , wherein the high-index dielectric block is a silicon resonator.

8. A device for controlling a metasurface to steer light, the device comprising:

a number of cells arranged on a substrate, each of the cells configured to receive light and including at least:

a high-index dielectric block including an interface between a positively-doped material and a negatively-doped material; and

electrodes configured to supply a voltage differential to the cell to flow current along a current path that passes through the high-index dielectric block, at least a portion of the current path being substantially parallel to a plane defined by the metasurface; and

dynamically altering a voltage differential supplied to the electrodes of each of the cells to alter a refractive index of each of the high-index dielectric blocks in order to controllably steer light exiting the cell.

9. The device of claim 8 , wherein each of the cells has dimensions that provide a Mie resonance mode to enhance an electric field component of light of a target wavelength.

10. The device of claim 8 , wherein each of the cells is doped to have a positive charge density that increases in a first direction of the cell and a negative charge density that increases in a second opposite direction of the cell.

11. The device of claim 10 , wherein the positive charge density and the negative charge density vary in a direction that is generally parallel to the plane defined by the metasurface.

12. The device of claim 10 , wherein the positive charge density and the negative charge density varies in a direction that is generally perpendicular to the plane defined by the metasurface.

13. The device of claim 10 , wherein the high-index dielectric block is a silicon resonator.

14. The device of claim 10 , further comprising a controller that dynamically alters a voltage differential supplied to the electrodes of each of the cells to alter a refractive index of each of the high-index dielectric blocks in order to controllably steer light exiting the cell.

15. The device of claim 14 , wherein the cell is reverse biased such that the controller applies a positive voltage to a first electrode in contact with a negatively-doped region and a negative voltage to a second electrode that is in contact with a positively-doped region.

16. A system comprising:

at least one cell including a high-index dielectric block including a junction between a positively-doped material and a negatively-doped material;

electrodes arranged on opposite sides of the at least one cell and each being separated from a phase-shifting portion of the high-index dielectric block, and

circuitry configured to supply a voltage differential to the electrodes and to dynamically alter the voltage differential to control a refractive index of the high-index dielectric block and thereby controllably steer light exiting the cell.

17. The system of claim 16 , wherein each of the cells has dimensions that provide a Mie resonance mode to enhance an electric field component of light of a target wavelength.

18. The system of claim 16 , wherein each of the cells is doped to have a positive charge density that increases in a first direction of the cell and a negative charge density that increases in a second opposite direction of the cell.

19. The system of claim 18 , wherein the positive charge density and the negative charge density varies in a direction that is generally perpendicular to a plane defined by a metasurface including the at least one cell.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 24, 2025
From: JAIN, ADITYA; JANDRIC, ZORAN; MOHR, DAN; GOMEZ, KEVIN A.; SUBRAMANIAN, KRISHNAN
To: SEAGATE TECHNOLOGY LLC
Reel/Frame 070311/0430 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 24, 2025
From: SEAGATE TECHNOLOGY LLC; SEAGATE SINGAPORE INTERNATIONAL HEADQUARTERS PTE. LTD.
To: LUMINAR TECHNOLOGIES, INC.
Reel/Frame 070311/0476 →
Continuity (3)
Continuation 16943927 · Jul 30, 2020
Provisional Application 62948234 · Dec 14, 2019
Related Publication 20240319415A1 · Sep 26, 2024
References Cited (5)
US 11927777B2 · Jain · 2024 [cited by examiner]
US 20180059505A1 · Kyoung · 2018 [cited by examiner]
US 20180241131A1 · Akselrod · 2018 [cited by examiner]
US 20190212586A1 · Wang · 2019 [cited by examiner]
US 20200041825A1 · Han · 2020 [cited by examiner]