Organotin patterning materials with ligands having silicon/germanium; precursor compositions; and synthesis methods
As described herein, photosensitive composition comprises RSnL 3 , where R is a hydrocarbyl ligand with 1-20 carbon atoms and one or more silicon and/or germanium heteroatoms and L is an acetylide ligand (—C≡CA, where A is a silyl group with 0 to 6 carbon atoms or an organo group with 1 to 10 carbon atoms). Methods are described wherein photosensitive compositions are synthesized by reacting RX, where X is a halide, and MSnL 3 , where M is an alkali metal, alkali earth metal or a pseudo-alkali earth metal, L is an acetylide or a dialkylamide. The radiation sensitive compositions are effective for radiation based patterning, such as with EUV light.
1. A method for patterning an organometallic compound comprising:
forming a coating on a substrate, wherein forming the coating comprises depositing RSnL 3 , wherein R is a hydrocarbyl group with 1-20 carbon atoms and one or more silicon or germanium heteroatoms, and L is a hydrolysable ligand;
irradiating the coating with radiation to form a latent image; and
developing the image to form a patterned coating with nanoscale features according to the latent image.
2. The method of claim 1 wherein the hydrolysable ligand comprises an alkoxide, a dialkylamide, or an alkyl/silyl acetylide.
3. The method of claim 1 wherein the substrate comprises silicon.
4. The method of claim 1 wherein the depositing comprises vapor deposition, spin coating, spray coating, or dip coating.
5. The method of claim 1 wherein the coating has an average thickness from 0.5 nm to 100 nm.
6. The method of claim 1 wherein the coating has a root-mean square surface roughness of less than 0.5 nm as measured by atomic force microscopy.
7. The method of claim 1 further comprising heating the coating to a temperature between about 30° C. and 300° C. for a period of time of about 10 seconds to about 10 minutes prior to irradiating the coating.
8. The method of claim 1 wherein the heating is performed under controlled partial pressures of gases, wherein the gases comprise H 2 O, CO 2 , CO, H 2 , N 2 , H 2 S, HCl, an inert gas, or a combination thereof.
9. The method of claim 1 wherein the irradiating comprises UV radiation or EUV radiation at a dose of about 1 mJ/cm 2 about 200 mJ/cm 2 or an electron beam at a dose equivalent to or not exceeding about 2 mC/cm 2 at 30 kV.
10. The method of claim 1 further comprising heating the coating to a temperature of 45° C. to about 300° C. for a period of time of at least about 0.1 minute to about 30 minutes after irradiating the coating the coating.
11. The method of claim 1 wherein the developing comprises an organic solvent or wherein the developing comprises a solvent-free process.