Granted Patent
B2
US 12,585,043 · App. 18/654,918 · Granted Mar 24, 2026
Scalable nanoimprint manufacturing of functional multi-layer metasurface devices
Inventors:
Chao Wang (Chandler, AZ); Yu Yao (Chandler, AZ); Shinhyuk Choi (Tempe, AZ); Jiawei Zuo (Tempe, AZ)
View Patent ↗
Loading inventors, assignments & file history…
Abstract
A polarimetric metastructure is disclosed that includes a metasurface structure, one or more vertically coupled double-layer metallic gratings, and a dielectric spacer layer between the metasurface structure and the vertically coupled double-layer metallic gratings.
Claims (7)
1 . A method of fabricating polarimetric metastructures, the method comprising:
performing a first nanoimprint lithography step to produce metasurface structures;
determining structural parameters of vertically coupled double-layer metallic gratings, wherein the structural parameters comprise a grating period (p), a grating height (h), a metal thickness (t), and a gap (g) for targeted polarimetric performance;
determining a dielectric spacer thickness (d);
performing a second nanoimprint lithography step to create a scaffold of the vertically coupled double-layer metallic gratings on top of a fabricated metasurface structure; and
depositing metal on vertically coupled double-layer metallic gratings resist polymer with a designed thickness (t).
2 . The method of claim 1 , further comprising depositing a resist layer onto a top layer of a substrate; applying a mold with grating morphology on at least a portion of the resist layer; applying pressure on the mold; applying heat or light radiation while the mold is held onto the resist layer.
Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded Feb 12, 2026
From: WANG, CHAO; YAO, YU; CHOI, SHINHYUK; ZUO, JIAWEI
To: ARIZONA BOARD OF REGENTS ON BEHALF OF ARIZONA STATE UNIVERSITY
Reel/Frame 073768/0210 →
Continuity (2)
Provisional Application
63500458
· May 5, 2023
References Cited (86)
US 20250044479A1
· Han
· 2025
[cited by examiner]
Zheng et al., All-dielectric trifunctional metasurface capable of independent amplitude and phase modulation, Laser & Photonics Reviews, 16(7), 2022, 10 pages.
[cited by applicant]
Overvig et al., Dielectric metasurfaces for complete and independent control of the optical amplitude and phase, Light: Science & Applications, 8(1), 2019, 12 pages.
[cited by applicant]
Liu et al., Multifunctional metasurfaces enabled by simultaneous and independent control of phase and amplitude for orthogonal polarization states, Light: Science & Applications, 10(1), 2021, 11 pages.
[cited by applicant]
Ren et al., Complex-amplitude metasurface-based orbital angular momentum holography in momentum space, Nature Nanotechnology, vol. 15, Nov. 2020, pp. 948-955.
[cited by applicant]
Wu et al., Liquid crystal programmable metasurface for terahertz beam steering, Applied Physics Letters, 116, 131104, 2020, 6 pages.
[cited by applicant]
Zuo et al., Chip-Integrated Metasurface Full-Stokes Polarimetric Imaging Sensor, Light:Science & Applications, 12 Article 218, 2023, 14 pages.
[cited by applicant]
Chou et al., Nanoimprint lithography, Journal of Vacuum Science & Technology B Micoelectronics and Nanometer Structures Processing Measurement and Phenomena, 14(6), 1996, pp. 4129-4133.
[cited by applicant]
Kim et al., Scalable manufacturing of high-index atomic layer-polymer hybrid metasurfaces for metaphotonics in the visible, Nature Materials 22, 2023, pp. 1-8.
[cited by applicant]
Kim et al., Holographic metasurface gas sensors for instantaneous visual alarms, Science Advances, 7(15), 2021, 9 pages.
[cited by applicant]
Takano et al., Wire-grid polarizer sheet in the terahertz region fabricated by nanoimprint technology, Optics letters, 36(14), 2011, pp. 2665-2667.
[cited by applicant]
Chen et al., Enhancement of the light conversion efficiency of silicon solar cells by using nanoimprint anti-reflection layer, Solar Energy Materials & Solar Cells, 94, 2010, pp. 629-633.
[cited by applicant]
Rinnerbauer et al., Nanoimprinted superlattice metallic photonic crystal as ultraselective solar absorber, Optica, 2 (8), 2015, pp. 743-746.
[cited by applicant]
Lee et al., Metasurface eyepiece for augmented reality, Nature Communications, 9 Article 4562, 2018, 10 pages.
[cited by applicant]
Pina-Hernandez et al., Nanoimprinted high-refractive index active photonic nanostructures based on quantum dots for visible light, Scientific Reports, 7, Article 17645, 2017, 8 pages.
[cited by applicant]
Yoon et al., Single-step manufacturing of hierarchical dielectric metalens in the visible, Nature Communications, 2020. 11(1) Article 2268, 10 pages.
[cited by applicant]
Joo et al., Metasurface-driven OLED displays beyond 10,000 pixels per inch, Science, 370, Oct. 23, 2020, pp. 459-463.
[cited by applicant]
Dong et al., Bi-layer cross chiral structure with strong optical activity and negative refractive index, Optics Express, vol. 17 Issue 16, 2009 p. 14172-14179.
[cited by applicant]
Zhu et al., Giant intrinsic chiro-optical activity in planar dielectric nanostructures, Light: Science & Applications, 7, 17158, 2018, 8 pages.
[cited by applicant]
Guo, Nanoimprint lithography: methods and material requirements, Advanced Materials, 19(4), 2007, p. 495-513.
[cited by applicant]
Lebib et al., Tri-layer systems for nanoimprint lithography with an improved process latitude, Microelectronic Engineering, 53, 2000, pp. 175-178.
[cited by applicant]
Morton et al., Wafer-scale patterning of sub-40 nm diameter and high aspect ratio (> 50: 1) silicon pillar arrays by nanoimprint and etching, Nanotechnology, 19(34): 345301, 2008, 7 pages.
[cited by applicant]
Hu et al., Fabrication of planar, layered nanoparticles using tri-layer resist templates, Nanotechnology, 22(18) 185302, 2011, 13 pages.
[cited by applicant]
Groves et al., Maskless electron beam lithography: prospects, progress, and challenges, Microelectronic Engineering 61-61, 2002, pp. 285-293.
[cited by applicant]
Gschrey et al., Resolution and alignment accuracy of low-temperature in situ electron beam lithography for nanophotonic device fabrication, Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics…
[cited by applicant]
Chen et al., Extended dual-grating alignment method for optical projection lithography, Applied Optics, vol. 49, No. 4, Feb. 2010, pp. 708-713.
[cited by applicant]
Muhlberger et al., A Moire method for high accuracy alignment in nanoimprint lithography, Microelectronic Engineering, 84, 2007, pp. 925-927.
[cited by applicant]
Li et al., Sub-20-nm Alignment in Nanoimprint Lithography Using Moire Fringe, Nano Letters, vol. 6, No. 11, 2006, pp. 2626-2629.
[cited by applicant]
Shao et al., Digital moire fringe measurement method for alignment in imprint lithography, Optics & Laser Technology, 44, 2012, pp. 446-451.
[cited by applicant]
Wang et al., Misalignment measurement with dual-frequency moire fringe in nanoimprint lithography, Optics Express, 28(5) 2020, p. 6755-6765.
[cited by applicant]
Ray, Deep reactive ion etching of fused silica using a single-coated soft mask layer for bio-analytical applications, Journal of Micromechanics and Microengineering, 20, 097002, 2010, 10 pages.
[cited by applicant]
Jung et al., Vapor-Phase Self-Assembled Monolayer for Improved Mole Release in Nanoimprint Lithography, Langmuir, 21, 2005, pp. 1158-1161.
[cited by applicant]
Austin et al., Fabrication of 5 nm linewidth and 14 nm pitch features by nanoimprint lithography, Applied Physics Letters, 84, 2004, pp. 5299-5301.
[cited by applicant]
Li et al., Demolding force dependence on mold surface modifications in UV nanoimprint lithography, Microelectronic Engineering, 236, 111470, 2021, 7 pages.
[cited by applicant]
Faber et al., Impact of Oxygen Plasma Treatment on the Device Performance of Zinc Oxide Nanoparticle-Based Thin-Film Transistors, ACS Applied Materials & Interfaces, 4, 2012, pp. 1693-1696.
[cited by applicant]
English et al., Improved contacts to MoS2 transistors by ultra-high vacuum metal deposition, Nano Letters, 16(6) 2016, p. 3824-3830.
[cited by applicant]
Dulmaa et al., On the grain size-thickness correlation for thin films, Acta Materialia, 212, 116896, 2021, 8 pages.
[cited by applicant]
Tyo et al., Target detection in optically scattering media by polarization-difference imaging, Applied Optics, vol. 35, No. 11, Apr. 10, 1996, pp. 1855-1870.
[cited by applicant]
Garren et al., Full-Polarization Matched-Illumination for Target Detection and Identification, IDDD Transactions on Aerospace and Electronic Systems, vol. 38, No. 3, Jul. 2002, pp. 824-837.
[cited by applicant]
Lu et al., Underwater optical image processing: a comprehensive review, 22(6), 2017, pp. 1204-1211.
[cited by applicant]
Demos et al., Deep subsurface imaging in tissues using spectral and polarization filtering, Optics Express, 7(1), 2000, pp. 23-28.
[cited by applicant]
Jacques et al., Imaging superficial tissues with polarized light, Lasers in surgery and medicine, 26(2), 2000, pp. 119-129.
[cited by applicant]
He et al., Polarisation optics for biomedical and clinical applications: a review, Light: Science & Applications, 10:194, 2021, pp. 1-20.
[cited by applicant]
Tyo et al., Review of passive imaging polarimetry for remote sensing applications, Applied optics, 45(22), 2006, pp. 5453-5469.
[cited by applicant]
Duan et al., Review of polarization imaging for international military application, International Symposium on Photoelectronic Detection and Imaging 2013: Imaging Sensors and Applications, 2013, International Society fo…
[cited by applicant]
Kuhn et al., Imaging polarimetric observations of a new circumstellar disk system, The Astrophysical Journal Letters, 553(2), 2001, p. L189.
[cited by applicant]
Pezzaniti et al., A division of aperture MWIR imaging polarimeter, Polarization Science and Remote Sensing II, 2005, International Society for Optics and Photonics, 12 pages.
[cited by applicant]
Tu et al., Division of amplitude RGB full-Stokes camera using micro-polarizer arrays, Optics Express 33160, 25(26), 2017, pp. 33160-33175.
[cited by applicant]
Vedel et al., Full Stokes polarization imaging camera, Polarization Science and Remote Sensing V, 2011, International Society for Optics and Photonics, 13 pages.
[cited by applicant]
Gruev et al., CCD polarization imaging sensor with aluminum nanowire optical filters, Optics express, 18(18), 2010, pp. 19087-19094.
[cited by applicant]
Wang et al., 30-nm-wide aluminum nanowire grid for ultrahigh contrast and transmittance polarizers made by UV-nanoimprint lighography, Applied Physics Letters, 89, 141105, 2006, 4 pages.
[cited by applicant]
Wang et al., High-performance, large area, deep ultraviolet to infrared polarizers based on 40 nm line/78 nm space nanowire grids, Applied Physics Letters, 90, 061104, 2007, 4 pages.
[cited by applicant]
Sony, Sony Polarsens 2022, Available from: https://www.sony-semicon.com/en/technology/industry/polarsens.html, 15 pages.
[cited by applicant]
Myhre et al., Liquid crystal polymer full-stokes division of focal plane polarimeter, Optics express, 20(25),2012 pp. 27393-27409.
[cited by applicant]
Hsu et al., Polarization microscope using a near infrared full-Stokes imaging polarimeter, Optics Express, 23(4), 2015, pp. 4357-4368.
[cited by applicant]
Gruev et al., Dual-tier thin film polymer polarization imaging sensor, Optics Express, vol. 18 Issue 18, 2010, pp. 19292-19303.
[cited by applicant]
Altaqui et al., Mantis shrimp-inspired organic photodetector for simultaneous hyperspectral and polarimetric imaging, Science Advances, vol. 7 Issue 10, 2021, 10 pages.
[cited by applicant]
Tu et al., Division of focal plane red-green-blue full-Stokes imaging polarimeter, Applied Optics, 59(22), 2020, pp. G33-G40.
[cited by applicant]
Intaravanne et al., Recent advances in optical metasurfaces for polarization detection and engineered polarization profiles, Nanophotonics, 9(5), 2020, pp. 1003-1014.
[cited by applicant]
Rubin et al., Matrix Fourier optics enables a compact full-Stokes polarization camera, Science 365, 43, 2019, 9 pages.
[cited by applicant]
Bai et al., Mid-Infrared Chip-Integrated Full-Stokes Polarimeter Array Based on Plasmonic Metasurfaces, 2022 Conference on Lasers and Electro-Optics (CLEO), IEEE, 2022, 2 pages.
[cited by applicant]
Arbabi et al., Full-Stokes imaging polarimetry using dielectric metasurfaces, Acs Photonics, 2018. 5(8): p. 3132-3140.
[cited by applicant]
Yang et al., Generalized Hartmann-Shack array of dielectric metalens sub-arrays for polarimetric beam profiling, Nature communications, 2018. 9(1): p. 1-7.
[cited by applicant]
Wu et al., Visible Metasurfaces for On-Chip Polarimetry, ACS Photonics, 5, 2018, pp. 2568-2573.
[cited by applicant]
Bai et al., Highly efficient anisotropic chiral plasmonic metamaterials for polarization conversion and detection, ACS Nano, 2021, 15(9): p. 14263-14274.
[cited by applicant]
Lee et al., Ultracompact Broadband Plasmonic Polarimeter, Laser Photonics Review, 12, 1700297, 2018, 10 pages.
[cited by applicant]
Mueller et al., Ultracompact metasurface in-line polarimeter, Optica, vol. 3 No. 1, pp. 42-47, 2016.
[cited by applicant]
Jung et al., Polarimetry using graphene-integrated anisotropic metasurfaces, ACS Photonics, 5(11), 2018, pp. 4283-4288.
[cited by applicant]
Afshinmanesh, et al., Measurement of the polarization state of light using an integrated plasmonic polarimeter, Nanophotonics, 1(2), 2012, pp. 125-129.
[cited by applicant]
Li et al., Monolithic Full-Stokes Near-Infrared Polarimetry with Chiral Plasmonic Metasurface Integrated Graphene- Silicon Photodetector, ACS Nano, 14, 2020, pp. 16634-16642.
[cited by applicant]
Ren et al., Full-Stokes Polarimetry for Visible Light Enabled by an All-Dielectric Metasurface, Advanced Photonics Research, Feb. 20, 2022, 8 pages.
[cited by applicant]
Shah et al., An All-Dielectric Metasurface Polarimeter, ACS Photonics, 9(10), 2022, pp. 3245-3252.
[cited by applicant]
Basiri et al., Nature-inspired chiral metasurfaces for circular polarization detection and full-Stokes polarimetric measurements, Light: Science and Applications, 8(1), 2019, pp. 1-11.
[cited by applicant]
Andreou et al., Polarization imaging: principles and integrated polarimeters, IEEE Sensors Journal, 2(6), 2002, pp. 566-576.
[cited by applicant]
Tokuda et al., Polarisation-analysing CMOS photosensor with monolithically embedded wire grid polariser, Electronics Letters, 45(4), 2009, pp. 228-230.
[cited by applicant]
Zhao et al., Thin photo-patterned micropolarizer array for CMOS image sensors, IEEE Photonics Technology Letters, 21(12), 2009, pp. 805-807.
[cited by applicant]
Gruev et al., Fabrication of a dual-tier thin film micropolarization array, Optics Express, 15(8), 2007, pp. 4994-5007.
[cited by applicant]
Thorlabs, PAX1000VIS/M—Polarimeter, Available from: https://www.thorlabs.com/thorproduct.cfm?partnumber=PAX1000VIS/M, 2 pages, 2025.
[cited by applicant]
Fan et al., Analysis of guided resonances in photonic crystal slabs, Physical Review B, vol. 65, 235112, 8 pages, 2002.
[cited by applicant]
Wang et al., Guided-mode resonances in planar dielectric-layer diffraction gratings, J. Opt. Soc. Am. A, vol. 7, No. 8, Aug. 1990, pp. 1470-1474.
[cited by applicant]
Wang et al., Theory and applications of guided-mode resonance filters, Applied Optics, vol. 32, No. 14, May 10, 1993, pp. 2606-2613.
[cited by applicant]
Berry et al., Measurement of the Stokes parameters of light, Applied Optics, 16(12), 1977, pp. 3200-3205.
[cited by applicant]
Ren et al., Sensor Modeling and Calibration Method Based on Extinction Ratio Error for Camera-Based Polarization Navigation Sensor, Sensors, 20(13), 2020, p. 3779.
[cited by applicant]
Azzam, Instrument matrix of the four-detector photopolarimeter: physical meaning of its rows and cols. and constraints on its elements, Journal of the Optical Society of America A, 7(1), 1990, p. 87-91.
[cited by applicant]
Xiong et al., Planar liquid crystal polarization optics for augmented reality and virtual reality: from fundamentals to applications, eLight, 1:3, 2021, 20 pages.
[cited by applicant]