Composition and methods using same for carbon doped silicon containing films
A composition and method for using the composition in the fabrication of an electronic device are disclosed. Compounds, compositions and methods for depositing a low dielectric constant (<4.0) and high oxygen ash resistance silicon-containing film such as, without limitation, a carbon doped silicon oxide, are disclosed.
1 . A method for forming a film comprising carbon doped silicon oxide using a thermal ALD process, the method comprising:
a. placing one or more substrates into a reactor;
b. heating the reactor to one or more temperatures ranging from ambient temperature to about 150° C. and optionally maintaining the reactor at a pressure of 100 torr or less;
c. introducing into the reactor at least one silicon precursor having one or two Si—C—Si linkages selected from the group consisting of 1,1,1,3,3,3-hexachloro-1,3-disilapropane, 1,1,1,3,3,3-hexachloro-2-methyl-1,3-disilapropane, 1,1,1,3,3,3-hexachloro-2,2-dimethyl-1,3-disilapropane, 1,1,1,3,3,3-hexachloro-2-ethyl-1,3-disilapropane, 1-chloro-1,3-disilacyclobutane, 1-bromo-1,3-disilacyclobutane, 1,3-dichloro-1,3-1,3-disilacyclobutane, 1,3-dibromo-1,3-disilacyclobutane, 1,1,3-trichloro-1,3-disilacyclobutane, 1,1,3-tribromo-1,3-disilacyclobutane, 1,1,3,3-tetrachloro-1,3-disilacyclobutane, 1,1,3,3-tetrabromo-1,3-disilacyclobutane, 1,3-dichloro-1,3-dimethyl-1,3-disilacyclobutane, 1,3-bromo-1,3-dimethyl-1,3-disilacyclobutane, 1,1, 1,3,3,5,5,5-octachloro-1,3,5-trisilapentane, 1,1,1,3,3,5,5,5-octachloro-1,3,5-trisilapentane, 1,1,1,3,3,5,5,5-octachloro-1,5-dimethyl-1,3,5-trisilapentane, 1,1,1,5,5,5-hexachloro-3,3-dimethyl-1,3,5-trisilapentane, 1,1,3,5,5,5-pentachloro-1,3,5-trimethyl-1,3,5-trisilapentane, 1,1,1,5,5,5-hexachloro-1,3,5-trisilapentane, 1,1,5,5-tetrachloro-1,3,5-trisilapentane and a catalyst;
d. purging the reactor with inert gas;
e. providing vapors of water into the reactor to react with the precursor, together with said catalyst which is ammonia or an organic amine, to form a carbon doped silicon oxide film on the substrate;
f. purging the reactor with inert gas;
g. repeating steps c to f until the carbon doped silicon oxide film reaches a desired thickness;
h. exposing the processed film to a plasma comprising hydrogen to improve at least one of the films' properties; and
i. optionally treating the carbon doped silicon oxide film with at least one treatment selected from the group consisting of a spike anneal at one or more temperatures ranging from 400° to 1000° C. and a UV light source.
2 . The method according to claim 1 , further comprising introducing a UV light source into the reactor during step c.
3 . The method of claim 1 , further comprising treating the carbon doped silicon oxide film with a thermal anneal at temperatures from 400 to 700° C.
4 . The method according to claim 1 wherein the catalyst is selected from the group consisting of pyridine, piperazine, trimethylamine, tert-butylamine, diethylamine, trimethylamine, and ethylenediamine.