IP Library Granted Patent US 12,473,316
Granted Patent B2
US 12,473,316 · App. 18/743,333 · Granted Nov 18, 2025

Molybdenum (0) precursors for deposition of molybdenum films

Inventors: Andrea Leoncini (Singapore, SG); Paul Mehlmann (Singapore, SG); Nemanja Dordevic (Singapore, SG); Han Vinh Huynh (Singapore, SG); Doreen Wei Ying Yong (Singapore, SG); Mark Saly (Santa Clara, CA); Bhaskar Jyoti Bhuyan (San Jose, CA)
Assignees: Applied Materials, Inc.; National University of Singapore
C07F11/00C23C16/0209C23C16/0227C23C16/0254C23C16/45527C23C16/56
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 12,473,316
App. No.
18/743,333
Granted
Nov 18, 2025
Kind
B2
Abstract

Molybdenum(0) coordination complexes comprising ligands which each coordinate to the metal center by nitrogen or phosphorous are described. Methods for depositing molybdenum-containing films on a substrate are described. The substrate is exposed to a molybdenum precursor and a reactant to form the molybdenum-containing film (e.g., elemental molybdenum, molybdenum oxide, molybdenum carbide, molybdenum silicide, molybdenum nitride). The exposures can be sequential or simultaneous.

Claims (9)

1 . A method of depositing a film, the method comprising:

exposing a substrate to a metal coordination complex consisting of a molybdenum(0) precursor having a general formula of Mo(L) z , wherein z is 2, and L is selected from the group consisting of

 wherein each R is independently selected from Me-, Et-, iPr-, and tBu-, and wherein the metal coordination complex is substantially free of halogens and carbonyl groups; and

exposing the substrate to a reactant to react with the molybdenum(0) precursor to form a molybdenum film on the substrate.

2 . The method of claim 1 , wherein the molybdenum film comprises one or more of a molybdenum metal (elemental Mo) film, a molybdenum oxide film, a molybdenum carbide film, a molybdenum silicide film, and a molybdenum nitride film.

3 . The method of claim 1 , wherein the substrate is exposed to the molybdenum(0) precursor and the reactant sequentially.

4 . The method of claim 1 , wherein the substrate is exposed to the molybdenum(0) precursor and the reactant simultaneously.

5 . The method of claim 1 , further comprising purging the substrate of the molybdenum(0) precursor prior to exposing the substrate to the reactant.

6 . The method of claim 5 , further comprising purging the substrate of the reactant and repeating the method to provide a molybdenum film having a thickness in a range of from about 0.3 nm to about 100 nm.

Assignments (3)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 21, 2025
From: YONG, DOREEN WEI YING
To: APPLIED MATERIALS, INC.
Reel/Frame 072617/0731 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 3, 2024
From: SALY, MARK; BHUYAN, BHASKAR JYOTI
To: APPLIED MATERIALS, INC.
Reel/Frame 067905/0984 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 3, 2024
From: LEONCINI, ANDREA; MEHLMANN, PAUL; DORDEVIC, NEMANJA; HUYNH, HAN VINH
To: NATIONAL UNIVERSITY OF SINGAPORE
Reel/Frame 067905/0987 →
Continuity (2)
Division 17146878 · Jan 12, 2021
Related Publication 20240343748A1 · Oct 17, 2024
References Cited (26)
US 7001831B2 · Niira et al. · 2006 [cited by applicant]
US 11530477B2 · Leoncini · 2022 [cited by examiner]
US 11584768B2 · Leoncini · 2023 [cited by examiner]
WO 2020076502A1 · 2020 [cited by applicant]
WO 2020185618A1 · 2020 [cited by applicant]
Dahlenburg, et al., “Untersuchungen zur C—H-Aktivierung durch d6-ML5-Komplexfragmente des Molybdans: Synthese and Reaktivitat der Hydridoderivate MoH2(PMe3)2(PP2), MoH 4 (PMe3)( pp2) and MoH( CH 2 PMe2) (PMe3) (pp2) (PP… [cited by applicant]
Dai, et al., “Preparation and Reactions of Molybdenum and Tungsten Hydride Complexes Containing the Tetraphosphane Ligand meso-o-C6H4(PPhCH2CH2PPh2)2”, Eur. J. Inorg. Chem. 2011, 141-149. [cited by applicant]
Emslie, et al., “Metal ALD and pulsed CVD: Fundamental reactions and links with solution chemistry”, Coordination Chemistry Reviews 257 (2013) 3282-3296. [cited by applicant]
Erhardt, et al., “Bonding situation and stability of n1- and n6-bonded heteroa”, Bonding situation and stability of n1- and n6-bonded heteroarene complexes M(n1-EC5H5)6 and M(n6-EC5H5)2 (M=Cr, Mo, W; E=N, P, As, Sb, Bi)… [cited by applicant]
Pal, et al., “Preparation and Hydrosilylation Activity of a Molybdenum Carbonyl Complex That Features a Pentadentate Bis(imino)pyridine Ligand”, Inorg. Chem. 2014, 53, 9357-9365. [cited by applicant]
Quirk, et al., “Convenient Syntheses of Zero Valent 2,2′-Bipyridine and Related Complexes of Transition Metals”, Polyhedron vol. 1, No. 2, pp. 209-211, 1982. [cited by applicant]
Wang, et al., “The Electron Transfer Series [Molll(bpy)3]n (n=3+, 2+, 1+, 0, 1-), and the Dinuclear Species [{MollICI (mebpy)2}2(u2-O)]Cl2 and [{MolV(tpy)2}2(u2-M004)](PF6)2 4MeCN”, Chem. Eur. J. 2014, 20, 9037-9044. [cited by applicant]
PCT International Search Report and Written Opinion in PCT/US2022/011797 dated Apr. 29, 2022, 11 pages. [cited by applicant]
Backes-Dahmann, Gabriele , et al., “Preparation and Electrochemical investigation of Monomeric Complexes of Molybdenum(O-VI) with the Ligand l,4,7-Trimethyl-1,4,7-triazacyclononane (L). Crystal Structure of [MolVLBr3](P… [cited by applicant]
Bezdek, M. J., et al., “Coordination-induced weakening of ammonia, water, and hydrazine X-H bonds in a molybdenum complex”, Science, 2016, vol. 354, No. 6313, pp. 730-733. [cited by applicant]
Cloke, F. , et al., “Synthesis of Zerov Alent Tris[Bis(l,2-(Dimethylphospidno)Ethane] Compounds of Chromium, Molybdenum, Tungsten, Vanadium, Niobium and Tantalum Using the Metal Vapours”, Journal of Organometallic Chemi… [cited by applicant]
Diskus, M. , et al., “Growth of thin films of molybdenum oxide by atomic layer deposition”, Journal of materials chemistry, 2011, vol. 21, No. 3, pp. 705-710. [cited by applicant]
Dubois , “Inorganic Chemistry; vol. 9, No. 4, 1970, 968-970”. [cited by applicant]
Green, Malcolm L.H., et al., “A Comparison of the Rates of Intramolecular Hydrogen Migration in the Molecules [Mo(n-C7 H8) 2 ]n+ to give [Mo (n-C7 H7 )(n-C7 H9 )n+,n =0 or 1: Crystal Structures of [MO(n-C7 H8 ) 2 ], [Mo… [cited by applicant]
Green, Jennifer C., et al., “Molybdenum-95 and Carbon-1 3 Nuclear Magnetic Shielding and Bonding Relationships in Sandwich Complexes”, J. Chem. Soc. Dalton Trans. 1986, pp. 1313-1316. [cited by applicant]
Green, Malcolm L.H., et al., “New Synthetic Pathways in n-Cycloheptatrienyl Molybdenum Chemistry”, J. Chem. Soc., Chem. Commun., 1992, pp. 918-919. [cited by applicant]
Green, Malcolm L.H., et al., “Synthesis and Reactions of n-Cycloheptatrienyl Derivatives of Molybdenum”, J. Chem. Soc. Dalton Trans. 1993, pp. 3203-3212. [cited by applicant]
Malkov, Andrei V., et al., “Synthesis of New Chiral 2,2¢-Bipyridyl-Type Ligands, Their Coordination to Molybdenum (0), Copper(II), and Palladium(II), and Application in Asymmetric Allylic Substitution, Allylic Oxidation… [cited by applicant]
Sattler, A. , “Chemistry of highly reactive group 5 and 6 transition metal compounds: modeling aspects of the industrial hydrotreating process and synthesis of the first transition metal complexes that feature a [CCC] X… [cited by applicant]
Wang, Y. , et al., “Interaction of molybdenum hexacarbonyl with metallic aluminum at high temperatures: carbide and alloy formation”, Journal of molecular catalysis A: Chemical, 2005, vol. 236, pp. 18-31. [cited by applicant]
Zhu, G. , et al., “Oxidative addition of dihydrogen to (η6-Arene)Mo(PMe3)3 complexes: origin of the naphthalene and anthracene effects”, Journal of the american chemical society, 2006, vol. 128, No. 16, pp. 5452-5461. [cited by applicant]
Cited By (1)
US 12,565,714