SURFACTANTS FOR ELECTRONICS
Pre-texturing agents, etchants, and photoresist stripping agents may be formulated to include one or more surfactants, from one or more surfactant classes, such as siloxane derivatives of amino acids that have surface-active properties.
1 . A formulation for a pre-texturing agent, comprising: at least one surfactant of Formula I:
wherein R 1 and R 2 are the same or different, and comprise at least one group selected from the group consisting of C 1 -C 6 alkyl, optionally the C 1 -C 6 alkyl may include one or more of oxygen, nitrogen, or sulfur atoms or groups that include at least one of these atoms, and the alkyl chain may be optionally substituted with one or more substituents selected from the group consisting of hydroxyl, amino, amido, sulfonyl, sulfonate, carbonyl, carboxyl, and carboxylate;
R 3 is selected from the group consisting of alkenyl, alkynyl, ester, alcohol, aryl alkyl, alkoxy alkyl ether, alkyl phosphate, C 3 -C 8 carboxylic acid, C 1 -C 10 alkyl benzoic acid, and a C 1 -C 6 linker attached to a second molecule of Formula I, wherein the second molecule is the same or different;
n is an integer from 1 to 12; and
X is selected from the group consisting of chloride, bromide, and iodide; and
at least one of one or more solvents and one or more defoaming agents.
2 . The formulation of claim 1 , further comprising at least one of one or more acids, one or more bases, or one or more chelating agents.
3 . A formulation for an etchant, comprising: at least one surfactant of Formula I:
wherein R 1 and R 2 are the same or different, and comprise at least one group selected from the group consisting of C 1 -C 6 alkyl, optionally the C 1 -C 6 alkyl may include one or more of oxygen, nitrogen, or sulfur atoms or groups that include at least one of these atoms, and the alkyl chain may be optionally substituted with one or more substituents selected from the group consisting of hydroxyl, amino, amido, sulfonyl, sulfonate, carbonyl, carboxyl, and carboxylate;
R 3 is selected from the group consisting of alkenyl, alkynyl, ester, alcohol, aryl alkyl, alkoxy alkyl ether, alkyl phosphate, C 3 -C 8 carboxylic acid, C 1 -C 10 alkyl benzoic acid, and a C 1 -C 6 linker attached to a second molecule of Formula I, wherein the second molecule is the same or different;
n is an integer from 1 to 12; and
X is selected from the group consisting of chloride, bromide, and iodide;
and hydrofluoric acid (HF).
4 . The formulation of claim 3 , further comprising one or more oxidizing agents.
5 . The formulation of claim 3 , further comprising one or more complexing agents.
6 . A formulation for a photoresist stripping formulation, comprising: at least one surfactant of Formula I:
wherein R 1 and R 2 are the same or different, and comprise at least one group selected from the group consisting of C 1 -C 6 alkyl, optionally the C 1 -C 6 alkyl may include one or more of oxygen, nitrogen, or sulfur atoms or groups that include at least one of these atoms, and the alkyl chain may be optionally substituted with one or more substituents selected from the group consisting of hydroxyl, amino, amido, sulfonyl, sulfonate, carbonyl, carboxyl, and carboxylate;
R 3 is selected from the group consisting of alkenyl, alkynyl, ester, alcohol, aryl alkyl, alkoxy alkyl ether, alkyl phosphate, C 3 -C 8 carboxylic acid, C 1 -C 10 alkyl benzoic acid, and a C 1 -C 6 linker attached to a second molecule of Formula I, wherein the second molecule is the same or different;
n is an integer from 1 to 12; and
X is selected from the group consisting of chloride, bromide, and iodide; and
an alkanolamine.
7 . The formulation of claim 6 , further comprising a sulfoxide.
8 . The formulation of claim 6 , further comprising a sulfone.
9 . The formulation of claim 6 , further comprising a glycol ether.
10 . A method of preparing a formulation the formulation of claim 1 comprising:
synthesizing a compound of Formula I
wherein R 1 and R 2 are the same or different, and comprise at least one group selected from the group consisting of C 1 -C 6 alkyl, optionally the C 1 -C 6 alkyl may include one or more of oxygen, nitrogen, or sulfur atoms or groups that include at least one of these atoms, and the alkyl chain may be optionally substituted with one or more substituents selected from the group consisting of hydroxyl, amino, amido, sulfonyl, sulfonate, carbonyl, carboxyl, and carboxylate; R 3 is selected from the group consisting of alkenyl, alkynyl, ester, alcohol, aryl alkyl, alkoxy alkyl ether, alkyl phosphate, C 3 -C 8 carboxylic acid, C 1 -C 10 alkyl benzoic acid, and a C 1 -C 6 linker attached to a second molecule of Formula I, wherein the second molecule is the same or different; n is an integer from 1 to 12; and X is selected from the group consisting of chloride, bromide, and iodide, the method comprising: a ring opening step to open lactam ring to provide an amino acid having an N-terminus and a C-terminus; a first alkylation step, to alkylate the N-terminus to provide a tertiary amine; a coupling step, to react the C-terminus with 3-aminopropyltris(trimethylsiloxy)silane to provide siloxane derivative; and a second alkylation step, to alkylate the N-terminus to provide a quaternary amine of Formula I, and
adding least one of one or more solvents and one or more defoaming agents.
11 . The method of claim 10 , wherein the lactam is caprolactam.
12 . The method of claim 10 , wherein in the first alkylation step, the tertiary amine is 6-(dimethylamino) hexanoic acid.
13 . The method of claim 10 , wherein in the second alkylation step, the N-terminus is alkylated with an alkylating agent selected from the group consisting of benzyl bromide, ethyl bromoacetate, allyl iodide, propargyl bromide, 1-bromo-2-(2-methoxyethoxy) ethane, bromo phosphonate, 3-iodopropanol, 3-bromopropanol, 2-iodoethanol, 2-bromoethanol, 6-bromohexanoic acid, and 1,3-dibromopropane.