Detecting device
A detecting device includes a plurality of ultrasonic transducers that transmit and receive ultrasonic waves. The detecting device includes a laminate, and a frame layer stacked on at least one face of a first face of the laminate and a second face opposite the first face. The laminate includes a flexible substrate, a circuit layer including a plurality of first electrodes and at least one second electrode, the circuit layer being stacked on the flexible substrate, and a piezoelectric layer stacked on the circuit layer. One of the ultrasonic transducers includes at least one of the first electrodes that is in contact with the piezoelectric layer, and at least one of the second electrodes that is in contact with the piezoelectric layer, and the frame layer has a cavity at a position that overlaps the first electrode in plan view.
1. A detecting device comprising a plurality of ultrasonic transducers that transmit and receive ultrasonic waves, the detecting device comprising:
a laminate; and
a frame layer stacked on at least one face of a first face of the laminate and a second face opposite the first face, wherein
the laminate comprises:
a flexible substrate;
a circuit layer comprising a plurality of first electrodes and at least one second electrode, the circuit layer being stacked on the flexible substrate; and
a piezoelectric layer stacked on the circuit layer,
one of the ultrasonic transducers comprises:
at least one of the first electrodes that is in contact with the piezoelectric layer; and
at least one of the second electrodes that is in contact with the piezoelectric layer, and
the frame layer has a cavity at a position that overlaps the first electrode in plan view.
2. The detecting device according to claim 1 , wherein the second electrode is in contact with a face of the piezoelectric layer opposite a face with which the first electrode is in contact, and the piezoelectric layer is sandwiched between the first electrode and the second electrode.
3. The detecting device according to claim 2 , wherein the second electrode is provided across the ultrasonic transducers.
4. The detecting device according to claim 2 , wherein the second electrode is provided to each of the ultrasonic transducers.
5. The detecting device according to claim 1 , wherein
the second electrode is provided to each of the ultrasonic transducers, and
the second electrode is in contact with a face on a same side as a face of the piezoelectric layer with which the first electrode is in contact.
6. The detecting device according to claim 5 , wherein
the second electrode is provided to each of the ultrasonic transducers,
the first electrode is annular, and
the second electrode is surrounded by the first electrode.
7. The detecting device according to claim 5 , wherein
the second electrode is provided to each of the ultrasonic transducers, and
the first electrode and the second electrode are disposed so as to be adjacent to each other.
8. The detecting device according to claim 4 , further comprising a reference potential wiring line that supplies a potential to the second electrode, wherein
the reference potential wiring line is routed to the ultrasonic transducer, and
the second electrode and the reference potential wiring line are electrically coupled to each other at a position that does not overlap the cavity in plan view.
9. The detecting device according to claim 1 , wherein
the ultrasonic transducer comprises a first switching element, and
the first switching element and the first electrode are electrically coupled at a position that does not overlap the cavity in plan view.
10. The detecting device according to claim 1 , further comprising a plurality of transmission signal lines and a plurality of reception signal lines, wherein
the ultrasonic transducer comprises a first switching element and a second switching element, and
the first electrode is coupled to one of the transmission signal lines through the first switching element and is coupled to one of the reception signal lines through the second switching element.
11. The detecting device according to claim 10 , wherein
the second electrode is provided to each of the ultrasonic transducers,
the ultrasonic transducer further comprises a third switching element,
the first electrode is coupled to a first transmission signal line of the transmission signal lines through the first switching element, and
the second electrode is coupled, through the third switching element, to a second transmission signal line to which an oscillation pulse of an opposite phase of the first transmission signal line is transmitted.
12. The detecting device according to claim 11 , further comprising a reference potential wiring line supplying a potential to the second electrode, wherein
the ultrasonic transducer further comprises a fourth switching element, and
the second electrode is coupled to the reference potential wiring line through the fourth switching element.
13. The detecting device according to claim 1 , wherein
one of the ultrasonic transducers comprises two of the first electrodes that are in contact with the piezoelectric layer, and
the frame layer has a first cavity at a position that overlaps one of the first electrodes, and a second cavity at a position that overlaps the other first electrode in plan view.
14. The detecting device according to claim 13 , wherein
the one of the first electrodes is an electrode for transmitting ultrasonic waves, and
the other first electrode is an electrode for receiving ultrasonic waves.
15. The detecting device according to claim 1 , wherein the frame layer is bonded to the flexible substrate.
16. The detecting device according to claim 1 , wherein the frame layer is bonded to an opposite side of the laminate from a side where the flexible substrate is present.
17. The detecting device according to claim 1 , wherein
two of the frame layers sandwich the laminate, and
the cavity of one of the frame layers and the cavity of the other frame layer are present at positions that overlap one another in plan view.