Liquid discharge head, recording device, and manufacturing method for liquid discharge head
A liquid discharge head includes pressure chambers, a girder, a vibration plate, individual electrodes, wiring lines, and an insulation layer. The pressure chambers include first and second pressure chambers adjacent in a first direction. The girder is between the first and second pressure chambers. The vibration plate overlaps the first and second pressure chambers in a plan view. The individual electrodes respectively overlap the pressure chambers in the plan view. The wiring lines are electrically connected to the individual electrodes, respectively. The insulation layer is between the vibration plate and an on-girder wiring line overlapping the girder in the plan view. The insulation layer includes first and second surfaces respectively facing the vibration plate and the on-girder wiring line, and overlaps the girder in the plan view. A length of the first surface in the first direction is smaller than a length of the second surface in the first direction.
1 . A liquid discharge head, comprising:
a first pressure chamber;
a second pressure chamber next to the first pressure chamber in a direction;
a girder between the first pressure chamber and the second pressure chamber in the direction;
a vibration plate overlapping on the first pressure chamber, the second pressure chamber and the girder;
a first individual electrode over the first pressure chamber;
a second individual electrode over the second pressure chamber;
an insulation layer on the vibration plate over the girder, the insulation layer comprising:
a first surface in contact with the vibration plate, having a first length in the direction; and
a second surface opposite to the first surface, having a second length in the direction, the first length smaller than the second length; and
a first on-girder wiring line on the second surface.
2 . The liquid discharge head according to claim 1 , wherein
the on-girder wiring line comprises;
a first end surface in contact with the insulation layer, having a third length in the direction; and
a second end surface positioned opposite to the first end surface, having a fourth length in the direction, the third length smaller than the fourth length.
3 . The liquid discharge head according to claim 1 , wherein the on-girder wiring line comprises;
a first end surface in contact with the insulation layer, having a third length in the direction; and
a second end surface positioned opposite to the first end surface, having a fourth length in the direction, the third length larger than the fourth length.
4 . The liquid discharge head according to claim 1 , further comprising a second on-girder wiring line that is on the second surface, wherein
the first on-girder wiring line comprises:
a first end surface in contact with the insulation layer, having a third length in the direction; and
a second end surface opposite to the first end surface, having a fourth length in the direction,
the second on-girder wiring line comprises:
a third end surface in contact with the insulation layer, having a fifth length in the direction; and
a fourth end surface opposite to the third end surface, having a sixth length in the direction, and
a summation of the third length and the fifth length is smaller than a summation of the fourth length and the sixth length.
5 . The liquid discharge head according to claim 1 , further comprising:
three or more of on-girder wiring lines including the on-girder wiring line arranged in the direction,
wherein each of the three or more on-girder wiring lines comprises a corresponding first end surface in contact with the insulation layer and a corresponding second end surface opposite to the first end surface, and
in the on-girder wiring lines at two ends in the direction, a summation of each length of the three or more first end surfaces in the direction is smaller than a summation of each length of the three or more second end surfaces in the direction.
6 . The liquid discharge head according to claim 5 , wherein
in one or more of the on-girder wiring lines positioned in a center portion in the direction, a difference between the summation of the lengths of the second end surfaces in the direction and the summation of the lengths of the first end surface in the direction is smaller than the difference in the on-girder wiring lines at the two ends in the direction.
7 . The liquid discharge head according to claim 4 , further comprising:
three or more of the on-girder wiring lines arranged in the direction,
wherein, in one or more of the on-girder wiring lines positioned in the center portion in the direction, a length of the first end surface in the direction is larger than a length of the second end surface in the direction.
8 . A liquid discharge head, comprising:
a first pressure chamber;
a second pressure chamber next to the first pressure chamber in a direction;
a girder between the first pressure chamber and the second pressure chamber in the direction;
a vibration plate overlapping on the first pressure chamber, the second pressure chamber and the girder;
a first individual electrode over the first pressure chamber;
a second individual electrode over the second pressure chamber;
an first on-girder wiring line over the girder, the first on-girder wiring line comprising:
a first end surface facing the vibration plate having a first length in the direction; and
a second end surface opposite to the first end surface, and having a second length in the direction, the first length smaller than the second length.
9 . The liquid discharge head according to claim 8 , further comprising:
a protective layer covering the first on-girder wiring line,
wherein a thickness in the direction of the protective layer in the first end surface is larger than a thickness in the direction of the protective layer in the second end surface, and
a length in the direction of an end surface of the protective layer opposite to the first end surface is equal to or larger than a length in the direction of the first on-girder wiring line and the protective layer in the first end surface, the first on-girder wiring line being interposed between the protective layer.
10 . The liquid discharge head according to claim 1 , wherein
the first pressure chamber comprises a first end in contact with the girder and the vibration plate,
the first on-girder wiring line comprises:
a third surface; and
a fourth surface opposed to the first surface, and closer to the girder than the third surface,
the fourth surface comprising, in a cross section perpendicular to the fourth surface, a second end and a third end opposed to the second end, wherein the second end is closer to the first pressure chamber than the third end; and
the first on-girder wiring line is, in the cross section, on or outside a distance between the first end and the second end.
11 . A recording device, comprising:
the liquid discharge head according to claim 1 .
12 . A manufacturing method for a liquid discharge head, comprising:
forming:
a first pressure chamber;
a second pressure chamber next to the first pressure chamber in a direction; and
a girder between the first pressure chamber and the second pressure chamber in the direction;
positioning a vibration plate to overlap on the first pressure chamber, the second pressure chamber, and the girder;
positioning:
a first individual electrode over the first pressure chamber; and
a second individual electrode over the second pressure chamber; and
positioning an insulation layer on the vibration plate over the girder, the insulation layer comprising:
a first surface in contact with the vibration plate, having a first length in the direction; and
a second surface facing the wiring line opposite to the first surface, having a second length in the direction, the first length smaller than the second length; and
a first on-girder wiring line on the second surface.
13 . A manufacturing method for a liquid discharge head, comprising:
forming:
a first pressure chamber;
a second pressure chamber next to the first pressure chamber in a direction; and
a girder between the first pressure chamber and the second pressure chamber in the direction;
positioning a vibration plate to overlap on the first pressure chamber, the second pressure chamber and the girder;
positioning:
a first individual electrode over the first pressure chamber; and
a second individual electrode over the second pressure chamber;
a first on-girder wiring line over the girder, the first on-girder wiring line comprising:
a first end surface facing the vibration plate having a first length in the direction; and
a second end surface opposite to the first end surface, and having a second length in the direction, the first length smaller than the second length.
14 . The liquid discharge head according to claim 1 , further comprising:
a third pressure chamber; and
a third electrode on the plate over the third chamber, wherein
the first on-girder wiring line is electrically coupled to the third electrode.
15 . The liquid discharge head according to claim 8 , wherein
the first pressure chamber comprises a first end in contact with the girder and the vibration plate,
the first on-girder wiring line comprises:
a third surface; and
a fourth surface opposed to the first surface, and closer to the girder than the third surface,
the fourth surface comprising, in a cross section perpendicular to the fourth surface, a second end and a third end opposed to the second end, wherein the second end is closer to the first pressure chamber than the third end; and
the first on-girder wiring line is, in the cross section, on or outside a distance between the first end and the second end.
16 . A recording device, comprising:
the liquid discharge head according to claim 8 .