METHOD FOR MANUFACTURING BONDED BODY AND METHOD FOR BONDING BODIES TO BE BONDED
A joined body in which a first joining target ( 11 ) and a second joining target ( 13 ) are joined with a joining layer interposed therebetween is produced. A paste that contains copper particles and an organic solvent is applied to the first joining target ( 11 ) to form a coating film ( 12 X). The second joining target ( 13 ) is placed on the coating film ( 12 X) to form a stack ( 15 ). The stack ( 15 ) is heated and pressed to sinter the copper particles contained in the coating film ( 12 X) to form a joining layer. The heating is performed incrementally from a heating start temperature to a highest temperature Tm, and the pressing is performed incrementally from a pressing start pressure to a highest pressure Pm, and control is performed in such a manner that a pressing pressure is 15 MPa or less when a heating temperature reaches 200° C.
1 . A method for producing a joined body in which a first joining target and a second joining target are joined with a joining layer interposed between the first joining target and the second joining target,
the method comprising:
a step of applying a paste that contains copper particles and an organic solvent to the first joining target to form a coating film;
a step of placing the second joining target on the coating film to form a stack; and
a sintering step of heating and pressing the stack to sinter the copper particles contained in the coating film to form the joining layer,
wherein, in the sintering step, the heating is performed incrementally from a heating start temperature to a highest temperature Tm, and the pressing is performed incrementally from a pressing start pressure to a highest pressure Pm, and control is performed in such a manner that a pressing pressure is 15 MPa or less when a heating temperature reaches 200° C.
2 . The method for producing a joined body according to claim 1 ,
wherein the paste is applied in such a manner that the coating film has such dimensions that the coating film extends from peripheral edges of the second joining target when the second joining target is placed on the coating film.
3 . The method for producing a joined body according to claim 1 ,