COPPER PASTE FOR PRESSURE BONDING, SEMICONDUCTOR DEVICE, METHOD FOR PREPARING COPPER PASTE FOR PRESSURE BONDING, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
Provided is a copper paste for pressure bonding, the copper paste at least containing two or more copper powders having different shapes and/or particle sizes and a solvent. The copper paste has a viscosity of 10 Pa·s or more and 200 Pa·s or less. The ratio of the total mass of the two or more copper powders to the mass of the copper paste, A, is 0.60 or more and less than 0.82. When the index of bulkiness, H, is defined as H=C/(A×B), H is 0.75 or more and 1.00 or less, wherein A is as defined above, B represents the film thickness of a coating film formed by applying the copper paste to a substrate, and C represents the film thickness of a dried coating film formed by drying the coating film in an air atmosphere at 110° C. for 20 minutes.
1 . A copper paste for pressure bonding, at least comprising: two or more copper powders having different shapes and/or particle sizes; and a solvent;
wherein the copper paste has a viscosity of 10 Pa·s or more and 200 Pa·s or less at 25° C.,
A is 0.60 or more and less than 0.82, and
H is 0.75 or more and 1.00 or less,
wherein A represents a ratio of a total mass of the two or more copper powders to a mass of the copper paste, and
H represents an index of bulkiness defined as H=C/(A×B),
wherein B represents a film thickness of a coating film formed by applying the copper paste to a member to be bonded, and
C represents a film thickness of a dried coating film formed by drying the coating film in an air atmosphere at 110° C. for 20 minutes.
2 . The copper paste for pressure bonding according to claim 1 ,
wherein the two or more copper powders having different shapes and/or particle sizes contain spherical copper particles and non-spherical copper particles,
the spherical copper particles have a cumulative volume particle size at a cumulative volume of 50 vol %, D SEM50 , of 60 nm or more and 300 nm or less, as determined by image analysis using a scanning electron microscope, and
the non-spherical copper particles have a cumulative volume particle size at a cumulative volume of 50 vol %, D 50 , of 0.1 μm or more and 50 μm or less, as determined by a laser diffraction scattering particle size distribution measurement method.
3 . The copper paste for pressure bonding according to claim 2 ,
wherein the non-spherical copper particles are flat copper particles, and
the flat copper particles have a length of a major axis, a, of 1 μm or more and 50 μm or less, as determined by image analysis using a scanning electron microscope.
4 . The copper paste for pressure bonding according to claim 2 ,
wherein the non-spherical copper particles are flat copper particles, and
the flat copper particles have an aspect ratio of 2 or more and 80 or less.
5 . The copper paste for pressure bonding according to claim 1 ,
wherein at least one of the two or more copper powders has a crystallite size ratio E/D of 1.1 or greater, wherein D represents a crystallite size at 100° C. and E represents a crystallite size at 300° C., as determined by high-temperature X-ray diffractometry.
6 . The copper paste for pressure bonding according to claim 1 , wherein the copper paste is used for bonding a member to be bonded having a thickness of not more than 10 times the film thickness of the dried coating film, C.
7 . The copper paste for pressure bonding according to claim 1 ,
wherein the solvent has a boiling point of 180° C. or higher.
8 . A semiconductor device comprising: a semiconductor element having a thickness of 0.25 mm or less, and a substrate; wherein the semiconductor element and the substrate are bonded to each other with the copper paste for pressure bonding according to claim 1 .
9 . A semiconductor device comprising: a first substrate on which a semiconductor element having an area of more than 25 mm 2 is mounted, and a second substrate; wherein the first substrate and the second substrate are bonded to each other with the copper paste for pressure bonding according to claim 1 .
10 . A method for producing a semiconductor device,
the method comprising:
providing a stack in which a member to be bonded, the copper paste for pressure bonding according to claim 1 , and another member to be bonded are put in this order, and
firing the copper paste for pressure bonding while a pressure of 0.1 MPa or more is applied;
wherein at least one of the members to be bonded includes a semiconductor element.
11 . A method for producing a copper paste for pressure bonding,
the method comprising: mixing two or more copper powders having different shapes and/or particle sizes, and a solvent,
wherein the mixing step is regulated such that the copper paste has a viscosity of 10 Pa·s or more and 200 Pa·s or less at a shear rate of 10 s −1 , and
the mixing step is further regulated such that A is 0.60 or more and less than 0.82, and H is 0.75 or more and 1.00 or less,
wherein A represents a ratio of a total mass of the two or more copper powders having different shapes and/or particle sizes to a mass of the copper paste, and
H represents an index of bulkiness defined as H=C/(A×B),
wherein B represents a film thickness of a coating film formed by applying the copper paste to a member to be bonded, and
C represents a film thickness of a dried coating film formed by drying the coating film in an air atmosphere at 110° C. for 20 minutes.