Granted Patent B2

US 12,730,074 · App. 18/897,514 · Granted Sep 8, 2026

Inventors: Chen Wang (Beijing, CN); Simian Zhang (Beijing, CN); Yuqi Wang (Beijing, CN); Xiaonan Deng (Beijing, CN); Yifei Wu (Beijing, CN); Zhengcao Li (Beijing, CN)

Assignee: Tsinghua University

G01N21/65G01N2201/06113G01N2201/0638

Abstract

Claims (58)

1 . A non-destructive in-situ measurement device for high-complexity structures based on Raman analysis, characterized by its use for measuring structural parameters of a structure under test within a sample under test, the device comprising:

a laser light source, wherein the laser light source is configured to emit a laser beam;

a focusing component, wherein the focusing component is configured to converge the laser beam and focus the laser beam, above a movable sample stage and position a focal plane of the focusing component at an initial position, and during a measurement process, the focal plane is controlled to move from the initial position to at least a bottom surface of the structure under test;

the movable sample stage, wherein the movable sample stage holds the sample under test and is configured to move in a plane perpendicular and/or parallel to an optical axis of the focusing component, wherein an axis of the structure under test is parallel to the optical axis and is located within a focal region of the laser beam; and

a detection module, wherein the detection module collects specific Raman scattering signals returned from the sample under test after scattering the laser beam, and the structural parameters of the structure under test are determined based on collected results,

wherein the determination of the structural parameters of the structure under test based on the collected results comprises:

determining a scanning curve corresponding to the focal plane based on a signal intensity of each collected result and a first distance moved by the focal plane towards the movable sample stage;

determining multiple feature points on the scanning curve and the corresponding first distance for each feature point; and

determining the structural parameters of the structure under test based on a Raman scattering model and/or a reference sample database corresponding to the structure under test, the feature points, and the corresponding first distances;

wherein the Raman scattering model is created based on reflection and/or scattering Raman signal patterns of the laser beam for a structure matching the structure under test; and

wherein parameters in the reference sample database are determined based on the reflection and/or scattering Raman signal patterns of the laser beam for a structure matching the structure under test.

2 . The device according to claim 1 , wherein the device further comprises:

an adjustable aperture, wherein the adjustable aperture blocks part of the Raman scattering signals, so that a signal corresponding to a focal region of Raman scattering is incident on the detection module.

3 . The device according to claim 1 , wherein the focusing component comprises:

an adjustable focusing component with an adjustable focal length,

wherein the adjustable focusing component adjusts the adjustable focal length during the measurement process, such that the focal plane moves from the initial position to at least the bottom surface of the structure under test.

4 . The device according to claim 1 , wherein the focusing component comprises a movable focusing component,

wherein the movable focusing component is configured to move along a first direction, away from or closer to the movable sample stage, wherein the first direction is parallel to the optical axis;

during the measurement process, the movable focusing component moves closer to the movable sample stage along the first direction, such that the focal plane moves from the initial position to at least the bottom surface of the structure under test;

the movable focusing component comprises an optical microscope, wherein the optical axis is an optical axis of an objective lens in the optical microscope.

5 . The device according to claim 1 , wherein the structural parameters comprise at least one of the following: a depth of the structure under test, a surface roughness of the structure under test, a sidewall roughness of the structure under test, an inner diameter variation of the structure under test, an elemental distribution of the structure under test, a defect distribution of the structure under test, a stress distribution of the structure under test, or a surface crystallinity of the structure under test.

6 . The device according to claim 5 , wherein the structural parameters of the structure under test are determined based on the Raman scattering model and/or the reference sample database corresponding to the structure under test, each of the feature points, and the corresponding first distance, the determination of the structural parameters further comprising:

determining a bottom surface maximum point and a top surface minimum point among the multiple feature points based on the Raman scattering model and/or the reference sample database corresponding to the structure under test;

determining the depth of the structure under test based on the first distance corresponding to the bottom surface maximum point and the top surface minimum point, respectively;

wherein determining the structural parameters of the structure under test based on the collected results further comprises at least one of the following:

determining the surface roughness and/or a sidewall roughness of the structure under test based on a local intensity of a collected signal;

determining the elemental distribution of the structure under test based on a type of the collected signal; or

determining any or a combination of the defect distribution, the stress distribution, and the surface crystallinity of the structure under test based on a signal range, a relative strength, and an offset of the collected results.

7 . A non-destructive in-situ measurement method for high-complexity structures based on Raman analysis, wherein it is applied to a non-destructive in-situ measurement device for high-complexity structures based on Raman analysis, characterized by its use for measuring structural parameters of a structure under test within a sample under test, the device comprising:

a laser light source, wherein the laser light source is configured to emit a laser beam;

a focusing component, wherein the focusing component is configured to converge the laser beam, focusing it above a movable sample stage and position a focal plane of the focusing component at an initial position, and during a measurement process, the focal plane is controlled to move from the initial position to at least a bottom surface of the structure under test;

the movable sample stage, wherein the movable sample stage holds the sample under test and is configured to move in a plane perpendicular and/or parallel to an optical axis of the focusing component, wherein an axis of the structure under test is parallel to the optical axis and is located within a focal region of the laser beam; and

a detection module, wherein the detection module collects specific Raman scattering signals returned from the sample under test after scattering the laser beam, and the structural parameters of the structure under test are determined based on collected results,

the method comprising:

fixing the sample under test to the movable sample stage, and ensuring that an axial direction of the structure under test within the sample is parallel to the optical axis of the focusing component;

controlling the laser light source to emit the laser beam towards the sample under test;

controlling the focusing component such that the focal plane of the focusing component is at the initial position above the movable sample stage;

controlling the movable sample stage to move in a plane perpendicular to the optical axis, such that a position of the structure under test coincides with the focal region of the laser beam;

during the measurement, controlling the focusing component to move the focal plane from the initial position to at least the bottom surface of the structure under test;

controlling the detection module to collect the specific Raman scattering signals returned after scattering of the laser beam by the sample under test, and determining the structural parameters of the structure under test based on the collected results,

wherein the determination of the structural parameters of the structure under test based on the collected results comprises:

determining a scanning curve corresponding to the focal plane based on a signal intensity of each collected result and a first distance moved by the focal plane towards the movable sample stage;

determining multiple feature points on the scanning curve and the corresponding first distance for each feature point; and

determining the structural parameters of the structure under test based on a Raman scattering model and/or a reference sample database corresponding to the structure under test, the feature points, and the corresponding first distances;

wherein the Raman scattering model is created based on reflection and/or scattering Raman signal patterns of the laser beam for a structure matching the structure under test; and

wherein parameters in the reference sample database are determined based on the reflection and/or scattering Raman signal patterns of the laser beam for a structure matching the structure under test.

8 . The method according to claim 7 , further comprising:

adjusting an aperture of an adjustable aperture to block a signal in the Raman scattering signals that does not correspond to the focal region, so that a signal corresponding to a focal region in the Raman scattering signals is incident on the detection module.

9 . The method according to claim 7 , further comprising:

after completing a measurement of a current structure under test, controlling the movable sample stage to move such that a next structure under test is in the focal region of the laser beam, in order to perform a measurement of the next structure under test.

10 . The method according to claim 7 , wherein the structural parameters comprise at least one of the following: a depth of the structure under test, a surface roughness of the structure under test, a sidewall roughness of the structure under test, an inner diameter variation of the structure under test, an elemental distribution of the structure under test, a defect distribution of the structure under test, a stress distribution of the structure under test, or a surface crystallinity of the structure under test.

11 . The method according to claim 10 , wherein the determination of the structural parameters of the structure under test based on the Raman scattering model and/or the reference sample database corresponding to the structure under test, each feature point, and the corresponding first distance comprises:

determining a bottom surface maximum point and a top surface minimum point among the multiple feature points based on the Raman scattering model and/or reference sample database corresponding to the structure under test;

determining the depth of the structure under test based on respective first distances corresponding to the bottom surface maximum point and the top surface minimum point;

wherein the determination of the structural parameters of the structure under test based on the collected results further comprises at least one of the following:

determining the surface roughness and/or sidewall roughness of the structure under test based on a local intensity of a collected signal;

determining the elemental distribution of the structure under test based on a type of the collected signal; or

determining any or a combination of the defect distribution, the stress distribution, and the surface crystallinity of the structure under test based on a signal range, a relative strength, and an offset of the collected results.

Assignments (1)

Priority Claims (2)

Continuity (2)

References Cited (21)