SOLAR CELL AND MANUFACTURING METHOD THEREFOR
A solar cell according to an embodiment of the present disclosure includes a first passivation layer including a first aluminum oxide layer positioned on a first conductivity-type region composed of a polycrystalline silicon layer having an n-type conductivity and having hydrogen, and a first dielectric layer positioned on the first aluminum oxide layer and including a material different from the first aluminum oxide layer.
1 . A method for manufacturing a solar cell, comprising:
forming a first conductivity-type region composed of a polycrystalline silicon layer having an n-type conductivity on a first surface of a semiconductor substrate;
forming a passivation layer including forming a first passivation layer on the first conductivity-type region; and
forming a first electrode passing through the first passivation layer and electrically connected to the first conductivity-type region,
wherein the forming the first passivation layer includes:
a process of forming a first aluminum oxide layer having hydrogen on the first conductivity-type region, and
a process of forming a first dielectric layer positioned on the first aluminum oxide layer, and the first dielectric layer including a material different from the first aluminum oxide layer;
wherein hydrogen included in the first aluminum oxide layer is implanted into at least one of the first conductivity-type region and the semiconductor substrate, by performing an annealing process in at least one of the forming the passivation layer and the forming the electrode; and
wherein the annealing process is performed at a temperature of 300° C. to 600° C.
2 . The method of claim 1 , further comprising:
before the forming the passivation layer, forming a second conductivity-type region at or on a second surface of the semiconductor substrate,
wherein the forming the passivation layer further includes forming a second passivation layer on the second conductivity-type region, and
the forming the second passivation layer includes a process of forming a second aluminum oxide layer on the second conductivity-type region, and a process of forming a second dielectric layer positioned on the second aluminum oxide layer, the second dielectric layer including a material different from the second aluminum oxide layer.
3 . The method of claim 2 , wherein the process of forming the second dielectric layer is performed at a temperature of 550° C. in a nitrogen atmosphere.
4 . The method of claim 2 , wherein the process of forming the first aluminum oxide layer and the process of forming the second aluminum oxide layer are performed together by a same process.
5 . The method of claim 2 , wherein in the forming the passivation layer, the process of the forming the first dielectric layer is performed after the process of forming the second dielectric layer is performed, and
the process of the forming the second dielectric layer includes a first annealing process in which hydrogen included in the first aluminum oxide layer is implanted into at least one of the first conductivity-type region and the semiconductor substrate.
6 . The method of claim 5 , wherein after performing the first annealing process, a deposition process of the first dielectric layer is performed.
7 . A solar cell, comprising:
a semiconductor substrate;
a first conductivity-type region formed on a first surface of the semiconductor substrate and composed of a polycrystalline silicon layer having an n-type conductivity;
a first passivation layer including:
a first aluminum oxide layer positioned on the first conductivity-type region and having hydrogen, and
a first dielectric layer positioned on the first aluminum oxide layer and including a material different from the first aluminum oxide layer; and
a first electrode passing through the first passivation layer and electrically connected to the first conductivity-type region,
wherein at least one of the first passivation layer and the first electrode is prepared by an annealing process, and the annealing process is performed at a temperature of 300° C. to 600° C.
8 . The solar cell of claim 7 , wherein the first dielectric layer includes silicon nitride, silicon oxide, or silicon oxynitride.
9 . The solar cell of claim 7 , wherein a thickness of the first aluminum oxide layer is less than a thickness of the first dielectric layer.
10 . The solar cell of claim 7 , wherein a hydrogen content per unit volume in the first aluminum oxide layer is greater than a hydrogen content per unit volume in the first dielectric layer.
11 . The solar cell of claim 7 , further comprising:
a silicon oxide layer positioned between the first conductivity-type region and the first passivation layer.
12 . The solar cell of claim 7 , wherein the first surface of the semiconductor substrate is a rear surface of the semiconductor substrate;
the first electrode includes a plurality of finger electrodes extending in one direction; and
the first dielectric layer functions as an anti-reflection film.
13 . The solar cell of claim 7 , further comprising:
a second conductivity-type region formed at or on a second surface of the semiconductor substrate and having a p-type conductivity;
a second passivation layer including:
a second aluminum oxide layer positioned on the second conductivity-type region; and
a second dielectric layer positioned on the second aluminum oxide layer and including a material different from the second aluminum oxide layer, wherein the second dielectric layer is performed at a temperature of 550° C. in a nitrogen atmosphere; and
a second electrode passing through the second passivation layer and electrically connected to the second conductivity-type region.
14 . The solar cell of claim 13 , wherein the second conductivity-type region is composed of a doped region constituting a part of the semiconductor substrate, and
the first aluminum oxide layer and the second aluminum oxide layer have the same material, composition, and thickness.
15 . A solar cell, comprising:
a semiconductor substrate;
a first conductivity-type region formed on a first surface of the semiconductor substrate and composed of a polycrystalline silicon layer having a first conductivity type;
a second conductivity-type region formed on a second surface of the semiconductor substrate and composed of a doped region having a second conductivity type;
a first passivation layer positioned on the first conductivity-type region;
a second passivation layer positioned on the second conductivity-type region;
a first electrode passing through the first passivation layer and electrically connected to the first conductivity-type region; and
a second electrode passing through the second passivation layer and electrically connected to the second conductivity-type region,
wherein each of the first and second passivation layers includes:
an aluminum oxide layer positioned on a respective one of the first conductivity-type region and the second conductivity-type region; and
a dielectric layer positioned on the aluminum oxide layer and including a material different from the aluminum oxide layer,
wherein at least one of the first passivation layer, the second passivation layer, the first electrode and the second electrode is prepared by an annealing process, and the annealing process is performed at a temperature of 300° C. to 600° C.
16 . The solar cell of claim 15 , wherein the dielectric layer is performed at a temperature of 550° C. in a nitrogen atmosphere.
17 . The solar cell of claim 15 , wherein the dielectric layer includes silicon nitride, silicon oxide, or silicon oxynitride.
18 . The solar cell of claim 15 , wherein a thickness of the aluminum oxide layer is less than a thickness of the dielectric layer.