POLISHING COMPOSITION FOR SEMICONDUCTOR PROCESS AND METHOD OF MANUFACTURING SUBSTRATE USING SAME
The polishing composition for semiconductor processing includes abrasive particles and a first metal ion, which is an alkali metal ion, wherein the abrasive particles have surface positive charges, and wherein an amount of the first metal ion is 15 ppm (by weight) to 100 ppm (by weight).
1 . A polishing composition for semiconductor processing comprising abrasive particles and a first metal ion, which is an alkali metal ion,
wherein the abrasive particles have surface positive charges, and
wherein an amount of the first metal ion is 15 ppm (by weight) to 100 ppm (by weight).
2 . The polishing composition of claim 1 , wherein the alkali metal ion is monovalent ion selected from the group consisting of lithium ions, sodium ions, potassium ions, rubidium ions, cesium ions, and francium ions.
3 . The polishing composition of claim 1 , further comprising a second metal ion selected from the group consisting of iron ions, copper ions, nickel ions, aluminum ions, calcium ions, and zinc ions.
4 . The polishing composition of claim 3 , wherein a ratio of an amount (by weight) of the second metal ion to the amount (by weight) of the first metal ion is 15 or more.
5 . The polishing composition of claim 1 , wherein the abrasive particles have a zeta potential of +10 mV to +50 mV at a pH of 2 to 5.5.
6 . The polishing composition of claim 1 , wherein the abrasive particles are surface-modified with a compound having an amine group.
7 . The polishing composition of claim 1 , wherein the abrasive particles are surface-modified with a compound having an amino silane selected from the group consisting of 3-aminopropyltriethoxysilane, bis[(3-triethoxysilyl)propyl]amine, 3-aminopropyltrimethoxysilane, bis[(3-trimethoxysilyl)propyl]amine, 3-Aminopropylmethyldiethoxysilane, 3-Aminopropylmethyldimethoxysilane, N-[3-(trimethoxysilyl)propyl]ethylenediamine, N-bis[3-(trimethoxysilyl)propyl]-1,2-ethylenediamine, N-[3-(triethoxysilyl)propyl]ethylenediamine, diethylenetriaminopropyltrimethoxysilane, diethylenetriaminopropylmethyldimethoxysilane, diethylaminomethyltriethoxysilane, diethylaminopropyltrimethoxysilane, and N-[3-diethylaminopropyltriethoxysilane, dimethylaminopropyltrimethoxysilane, (trimethoxysilyl)propyl]butylamine.
8 . The polishing composition of claim 1 , wherein the polishing composition comprises the abrasive particles in an amount of 1 wt % to 10 wt % based on a total weight of the polishing composition.
9 . The polishing composition of claim 1 , wherein the abrasive particles have an average particle diameter of 20 nm or more.
10 . The polishing composition of claim 1 , wherein the polishing composition have an electrical conductivity of 10 μS/cm to 300 μS/cm.
11 . The polishing composition of claim 1 , further comprising a fluorinated surfactant.
12 . The polishing composition of claim 11 , wherein the fluorinated surfactant is a fluoroalkyl alkylene oxide-based compound of Formula 1:
R f —(R en —O) n —H [Formula 1]
where, in Formula 1 above, R f is a fluoroalkyl group having a carbon number from 3 to 10, R en is an alkylene group having a carbon number from 2 or 3, and n is an integer from 2 to 15.
13 . The polishing composition of claim 11 , wherein the polishing composition comprises 10 ppm (by weight) to 500 ppm (by weight) of the fluorinated surfactant.
14 . The polishing composition of claim 1 , wherein the polishing composition has a viscosity of 0.8 cP to 2.0 cP at 25° C.
15 . The polishing composition of claim 11 , wherein the fluorinated surfactant has a weight average molecular weight of 150 g/mol to 3,000 g/mol.
16 . The polishing composition of claim 1 , further comprising an additive selected from the group consisting of an oxidizing agent, an acid component, a pH modifier, a chelating agent, a dispersant, a polishing rate enhancer, a polishing modifier, a polishing pad protector, and a preservative.
17 . A method of manufacturing a substrate comprising polishing the substrate by applying the polishing composition of claim 1 as a slurry.
18 . The method of claim 17 , wherein the polishing comprises:
contacting the substrate with a polishing pad and the polishing composition supplied from a spray nozzle; and
rotating a polishing head fixing the substrate and a platen, to which the polishing pad is attached.
19 . The method of claim 17 , wherein during the polishing, a pressure of 6.89 kPa to 48.26 kPa is applied to the substrate.
20 . The method of claim 17 , wherein the substrate comprises at least one of an insulating film, metallized wiring, and a barrier layer.