Back contact solar cell and method for manufacturing same
This disclosure provides a back contact solar cell and a method for manufacturing a back contact solar cell. In one example, a back contact solar cell includes a silicon substrate having first regions and second regions alternately distributed on a back surface of the silicon substrate, and a first doped semiconductor layer formed on a first region on the back surface of the silicon substrate. A groove structure concaving inward the silicon substrate relative to a surface of the first region is formed on a second region. An end portion of the first doped semiconductor layer adjacent to the second region is arranged in a suspended manner.
1 . A back contact solar cell, comprising:
a silicon substrate having a back surface comprising first regions and second regions that are alternately distributed;
a first doped semiconductor layer formed on a first region on the back surface; and
a groove structure formed on a second region, wherein the groove structure concaves inward into the silicon substrate relative to a surface of the first region, wherein an end portion of the first doped semiconductor layer adjacent to the second region is arranged in a suspended manner, wherein at least a partial surface in a side wall of the groove structure is arranged obliquely relative to a horizontal plane, to cause a cross-sectional area of at least a partial region of the groove structure to increase along a direction from a light receiving surface of the silicon substrate to the back surface, wherein the side wall of the groove structure comprises a planar surface arranged in parallel to the horizontal plane, and wherein the planar surface is between a partial surface close to a groove opening and a partial surface close to a groove bottom, and wherein the groove bottom comprises a textured surface.
2 . The back contact solar cell according to claim 1 , wherein a depth of the groove structure is greater than or equal to 200 nm and less than or equal to 2500 nm, and
wherein along a direction that the first regions and the second regions are alternately distributed, a length of the end portion arranged in the suspended manner in the first doped semiconductor layer is less than or equal to 3000 nm.
3 . The back contact solar cell according to claim 1 ,
wherein in the side wall of the groove structure, a partial surface close to a groove opening is arranged perpendicular to the horizontal plane.
4 . The back contact solar cell according to claim 3 , wherein at least a partial surface in the side wall of the groove structure is arranged obliquely relative to the horizontal plane at an angle greater than or equal to 52° and less than or equal to 58°.
5 . The back contact solar cell according to claim 1 , wherein along a direction that the first regions and the second regions are alternately distributed:
a length of the planar surface arranged parallel to the horizontal plane in the side wall of the groove structure is less than 2 μm, and
a minimum distance between the planar surface arranged parallel to the horizontal plane in the side wall of the groove structure and the groove opening of the groove structure is greater than 0 and less than 1 μm.
6 . The back contact solar cell according to claim 1 , wherein at least a partial surface of a groove bottom of the groove structure is a textured surface.
7 . The back contact solar cell according to claim 1 , wherein the back contact solar cell further comprises a second doped semiconductor layer formed on the groove structure, wherein a conductivity type of the second doped semiconductor layer is opposite to a conductivity type of the first doped semiconductor layer.
8 . The back contact solar cell according to claim 7 , wherein the back contact solar cell further comprises:
a first passivation layer between the first region and the first doped semiconductor layer, wherein the first passivation layer is a tunneling passivation layer and the first doped semiconductor layer is a doped polysilicon layer; and
a second passivation layer between the silicon substrate and the second doped semiconductor layer.
9 . The back contact solar cell according to claim 7 , wherein the groove structure has a gap between the first doped semiconductor layer and the second doped semiconductor layer along a direction that the first regions and the second regions are alternately distributed, and
wherein the surface of the second doped semiconductor layer does not extend to be suspended at a side wall close to the second doped semiconductor layer.
10 . The back contact solar cell according to claim 8 , wherein the second passivation layer is a tunneling passivation layer, and the second doped semiconductor layer is a doped polysilicon layer.
11 . The back contact solar cell according to claim 9 , wherein the gap between the first doped semiconductor layer and the second doped semiconductor layer is greater than or equal to 20 μm and less than or equal to 110 μm.