OPTICAL FILTER ARRAY
A device may include a filter array disposed on a substrate. The filter array may include a first mirror disposed on the substrate. The filter array may include a plurality of spacers disposed on the first mirror. A first spacer, of the plurality of spacers, may be associated with a first thickness. A second spacer, of the plurality of spacers, may be associated with a second thickness that is different from the first thickness. A first channel corresponding to the first spacer and a second channel corresponding to the second spacer may be associated with a separation width of less than approximately 10 micrometers (μm). The filter array may include a second mirror disposed on the plurality of spacers.
1 . A device, comprising:
a substrate; and
a set of optical filter layers disposed on the substrate,
the set of optical filter layers including:
a set of zinc oxide (ZnO) layers,
a set of metal mirrors, and
a set of spacer layers,
the set of spacer layers comprising a set of three channels for visible light detection and a fourth channel for depth sensing.
2 . The device of claim 1 , wherein the set of three channels for visible light detection comprises:
a first channel for blue visible light detection,
a second channel for green visible light detection, and
a third channel for red visible light detection.
3 . The device of claim 2 , wherein the first channel is associated with a total thickness of approximately 44.8 nanometers (nm), the second channel is associated with a total thickness of approximately 60.5 nm, and the third channel is associated with a total thickness of approximately 82.9 nm.
4 . The device of claim 1 , wherein the fourth channel is associated with a total thickness of approximately 134.5 nanometers (nm).
5 . The device of claim 1 , wherein each channel, of the set of spacer layers, is a separate filter stack.
6 . The device of claim 1 , wherein each channel, of the set of spacer layers, share a common filter layer.
7 . The device of claim 1 , wherein each channel, of the set of spacer layers, is deposited on a portion of a previously deposited filter layer.
8 . The device of claim 1 , wherein the set of optical filter layers further comprises one or more sets of niobium titanium oxide layers.
9 . A device, comprising:
a substrate; and
a set of optical filter layers disposed on the substrate,
the set of optical filter layers including:
a set of zinc oxide (ZnO) layers,
a set of semi-transparent metal mirrors, and
a set of niobium titanium oxide (NbTiOx) layers.
10 . The device of claim 9 , wherein the set of semi-transparent metal mirrors are a set of silver (Ag) layers.
11 . The device of claim 9 , wherein the set of optical filter layers further comprises a set of silicon dioxide (SiO2) layers.
12 . The device of claim 11 , wherein a first SiO2 layer, of the set of SiO2 layers, is associated with a thickness of approximately 18 nanometers (nm).
13 . The device of claim 12 , wherein a second SiO2 layer, of the set of SiO2 layers, is associated with a thickness of approximately 101 nm.
14 . The device of claim 9 , wherein a first NbTiOx layer, of the set of NbTiOx layers, forms a set of spacers, and
wherein the first NbTiOx layer comprises different thicknesses corresponding to the set of spacers.
15 . The device of claim 14 , wherein a second NbTiOx layer, of the set of NbTiOx layers, is associated with a thickness of approximately 50 nanometers (nm).
16 . The device of claim 15 , wherein a third NbTiOx layer, of the set of NbTiOx layers, is associated with a thickness of approximately 16 nm.
17 . A device, comprising:
a substrate; and
a set of optical filter layers disposed on the substrate,
the set of optical filter layers including:
a set of zinc oxide (ZnO) layers,
a set of silver (Ag) layers, and
a niobium titanium oxide (NbTiOx) layer corresponding to a set of spacers,
wherein the NbTiOx layer comprises different thicknesses corresponding to the set of spacers.
18 . The device of claim 17 , wherein each of the set of ZnO layers is associated with a thickness of approximately 1.5 nanometers (nm).
19 . The device of claim 17 , wherein the set of spacers comprises:
a first channel for blue visible light detection,
a second channel for green visible light detection,
a third channel for red visible light detection, and
a fourth channel for infrared (IR) and blue light detection.
20 . The device of claim 19 , wherein the first channel is associated with a center wavelength of approximately 450 nanometers (nm), the second channel is associated with a center wavelength of approximately 520 nm, the third channel is associated with a center wavelength of approximately 620 nm, and the fourth channel associated with IR and blue light detection is associated with center wavelengths of approximately 450 nm for blue light and 850 nm for IR light.