Patent Application
Utility
PCT National Stage
App. No. 19/143,073
· Confirmation No. 7511
Radical Sensing for Process Tool Diagnostics
Applicant:
MKS Inc.
Docketed New Case - Ready for Examination
View Publication ↗
|
⬇ PDF
|
Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2026-08-17 | APP.FILE.REC |
Filing Receipt | 4 | View | |
| 2026-08-12 | R3.73 |
Assignee showing of ownership per 37 CFR 3.73 | 3 | View | |
| 2026-08-12 | CFILE |
Request for Corrected Filing Receipt | 5 | View | |
| 2026-08-12 | R46C.REQ |
Request under 37CFR1.46(c) to correct, update, change applicant | 2 | View | |
| 2026-08-12 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2026-07-30 | NTC.PUB |
Notice of Publication | 1 | View | |
| 2026-06-06 | M327 |
Miscellaneous Communication to Applicant - No Action Count | 1 | View | |
| 2026-06-06 | PREDOCK.NTF |
Patents Pre-Docketing Notice | 2 | View | |
| 2026-04-21 | M903 |
Notice of Designated Office (DO) / Elected Office (EO) Acceptance Mailed | 2 | View | |
| 2026-04-21 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2026-04-21 | APP.FILE.REC |
Filing Receipt | 4 | View | |
| 2026-04-21 | WCLM |
Claims Worksheet (PTO-2022) | 1 | View | |
| 2026-04-21 | WELCOME.LET |
Welcome Letter from USPTO Director and Deputy Director | 1 | View | |
| 2025-08-25 | RFND |
Refund Denied | 2 | View | |
| 2025-08-15 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2025-08-15 | RFN.REQ |
Refund Request | 8 | View | |
| 2025-08-12 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2025-08-12 | FOR |
Foreign Reference | 3 | View | |
| 2025-08-12 | FOR |
Foreign Reference | 14 | View | |
| 2025-08-12 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 5 | View | |
| 2025-06-27 | PET.DEC.OIPE |
Petition decision routed to the Office of Patent Application Processing(OPAP) to act on the decision or continue prosecution | 2 | View | |
| 2025-06-25 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2025-06-25 | OATH |
Oath or Declaration filed | 3 | View | |
| 2025-06-25 | APP.TEXT |
Application body structured text document | — | View | |
| 2025-06-25 | PA.. |
Power of Attorney | 3 | View | |
| 2025-06-25 | N417.PYMT |
Electronic Fee Payment | 2 | View | |
| 2025-06-25 | PET.PCT |
Petition for review by the PCT legal office | 4 | View | |
| 2025-06-25 | 371P |
Documents submitted with 371 (National Stage) Applications | 4 | View | |
| 2025-06-25 | SPEC |
Specification | 23 | View | |
| 2025-06-25 | CLM |
Claims | 4 | View | |
| 2025-06-25 | ABST |
Abstract | 1 | View | |
| 2025-06-25 | ADS |
Application Data Sheet | 7 | View | |
| 2025-06-25 | TRNA |
Transmittal of New Application | 5 | View | |
| 2025-06-25 | DRW |
Drawings-only black and white line drawings | 11 | View | |
| 2025-06-25 | 371P |
Documents submitted with 371 (National Stage) Applications | 4 | View | |
| 2025-06-25 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2025-06-25 | 371P |
Documents submitted with 371 (National Stage) Applications | 43 | View | |
| 2025-06-25 | DRW.SUPP |
Drawings-black and white line and/or other drawings | — | View | |
| 2025-06-25 | SCORE |
Placeholder sheet indicating presence of supplemental content in Supplemental Complex Repository for Examiners(SCORE) | 1 | View | |
| 2025-06-25 | FRPR |
Certified Copy of Foreign Priority Application | 41 | View | |
| 2025-06-25 | P.N.101.CONV |
PCT/RO/101 - Request form for new International Application - Conventional | 5 | View | |
| 2025-06-25 | ABST |
Abstract | 2 | View | |
| 2025-06-25 | SPEC |
Specification | 23 | View | |
| 2025-06-25 | CLM |
Claims | 4 | View | |
| 2025-06-25 | DRW |
Drawings-only black and white line drawings | 11 | View |
Inventors
Jimmy Liu
San Jose, CA
Chenglong Yang
Fremont, CA
James Blessing
Morgan Hill, CA
Keith K. Koai
Acton, MA
Guy Rosenzweig
Cambridge, MA
Amanda Larson
Medford, MA
Attorneys & Agents of Record
Classification
USPC
438/14
H01J37/32972
H01J37/3299
H05H1/0037
H01J37/32853
H01J37/3288
H01J37/32917
H01J37/32926
H05H1/0043
Prosecution
- Examiner
- CENTRAL, DOCKET
- Art Unit
- OPAP
- Customer No.
- 45134
- Docket No.
- E314-US
- Confirmation No.
- 7511
Publication
- Pub. No.
- US20260221402A1
- Pub. Date
- 2026-07-30
SECURITY INTEREST
Recorded 2025-08-01
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2025-06-25
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
- App. No.
- 19/143,073
- Filed
- 2025-06-25
- Pub. No.
- US20260221402A1
- Examiner
- CENTRAL, DOCKET
- Art Unit
- OPAP
External Links