Patent Application
Provisional
App. No. 63/383,955
· Confirmation No. 7891
RADICAL SENSING FOR PROCESS TOOL DIAGNOSTICS
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2022-11-22 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2022-11-16 | APP.TEXT |
Application body structured text document | — | View | |
| 2022-11-16 | TR.PROV |
Provisional Cover Sheet (SB16) | — | View | |
| 2022-11-16 | DRW |
Drawings-only black and white line drawings | — | View | |
| 2022-11-16 | N417 |
Electronic Filing System Acknowledgment Receipt | — | View | |
| 2022-11-16 | SPEC |
Specification | — | View | |
| 2022-11-16 | CLM |
Claims | — | View | |
| 2022-11-16 | N417.PYMT |
Electronic Fee Payment | — | View |
Inventors
Jimmy Liu
San Jose, CA
Chenglong Yang
Fremont, CA
James Blessing
Morgan Hill, CA
Keith Koai
Acton, MA
Guy Rosenzweig
Cambridge, MA
Amanda Larson
Medford, MA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 45134
- Docket No.
- E314-P1
- Confirmation No.
- 7891
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 63/383,955
- Filed
- 2022-11-16
External Links