Patent Application
Utility
PCT National Stage
App. No. 19/165,253
· Confirmation No. 6465
Real Time Radical Output Monitoring Using Optical Emission Spectroscopy
Applicant:
MKS Inc.
Docketed New Case - Ready for Examination
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| 2026-05-29 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2026-05-29 | APP.FILE.REC |
Filing Receipt | 4 | View | |
| 2026-05-29 | WCLM |
Claims Worksheet (PTO-2022) | 1 | View | |
| 2026-05-29 | M903 |
Notice of Designated Office (DO) / Elected Office (EO) Acceptance Mailed | 2 | View | |
| 2026-05-29 | WELCOME.LET |
Welcome Letter from USPTO Director and Deputy Director | 1 | View | |
| 2025-12-11 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 5 | View | |
| 2025-12-11 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2025-12-11 | FOR |
Foreign Reference | 42 | View | |
| 2025-09-15 | 371P |
Documents submitted with 371 (National Stage) Applications | 1 | View | |
| 2025-09-15 | 371P |
Documents submitted with 371 (National Stage) Applications | 27 | View | |
| 2025-09-15 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2025-09-15 | R46C.REQ |
Request under 37CFR1.46(c) to correct, update, change applicant | 2 | View | |
| 2025-09-15 | N417.PYMT |
Electronic Fee Payment | 2 | View | |
| 2025-09-15 | P.210.IN |
Incoming ISR, 237 and References from IB | 3 | View | |
| 2025-09-15 | ADS |
Application Data Sheet | 9 | View | |
| 2025-09-15 | TRNA |
Transmittal of New Application | 5 | View | |
| 2025-09-15 | OATH |
Oath or Declaration filed | 3 | View | |
| 2025-09-15 | P.237.IN |
Incoming Written Opinion of the International Searching Authority (ISA) | 6 | View | |
| 2025-09-15 | 371P |
Documents submitted with 371 (National Stage) Applications | 3 | View | |
| 2025-09-15 | PA.. |
Power of Attorney | 3 | View | |
| 2025-09-15 | P.N.101.CONV |
PCT/RO/101 - Request form for new International Application - Conventional | 4 | View | |
| 2025-09-15 | FRPR |
Certified Copy of Foreign Priority Application | 38 | View | |
| 2025-09-15 | P.306 |
PCT/IB/306 - Notification of the Recording of a Change | 3 | View | |
| 2025-09-15 | P.306 |
PCT/IB/306 - Notification of the Recording of a Change | 1 | View | |
| 2025-09-15 | ABST |
Abstract | 2 | View | |
| 2025-09-15 | SPEC |
Specification | 17 | View | |
| 2025-09-15 | CLM |
Claims | 3 | View | |
| 2025-09-15 | DRW |
Drawings-only black and white line drawings | 3 | View |
Inventors
Ilya Pokidov
Winchester, MA
Guy Rosenzweig
Andover, MA
Robert Hallock
Berlin, MA
Mark Roberts
Cape Neddick, ME
Attorneys & Agents of Record
Classification
USPC
356/316
H01J37/3299
H10P72/0421
G01N21/71
H01J37/32018
H01J37/32357
H01J2237/334
Prosecution
- Examiner
- CENTRAL, DOCKET
- Art Unit
- OPAP
- Customer No.
- 45134
- Docket No.
- E317-WO-US
- Confirmation No.
- 6465
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 19/165,253
- Filed
- 2025-09-15
- Examiner
- CENTRAL, DOCKET
- Art Unit
- OPAP
External Links