Patent Application
Provisional
App. No. 63/453,561
· Confirmation No. 5040
Real Time Radical Output Monitoring Using Optical Emission Spectroscopy
Applicant:
MKS Instruments, Inc.
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2023-03-28 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2023-03-21 | ADS |
Application Data Sheet | 8 | View | |
| 2023-03-21 | SPEC |
Specification | 15 | View | |
| 2023-03-21 | CLM |
Claims | 1 | View | |
| 2023-03-21 | DRW |
Drawings-only black and white line drawings | 8 | View | |
| 2023-03-21 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2023-03-21 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View |
Inventors
Ilya Pokidov
Wilmington, MA
Guy Rosenzweig
Wilmington, MA
Robert Hallock
Wilmington, MA
Mark Roberts
Wilmington, MA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 45134
- Docket No.
- E317-P1
- Confirmation No.
- 5040
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 63/453,561
- Filed
- 2023-03-21
External Links