Patent Application
Utility
App. No. 19/429,899
· Confirmation No. 1703
Precursors and Flowable CVD Methods for Making Low-K Films to Fill Surface Features
Applicant:
Versum Materials US, LLC
Docketed New Case - Ready for Examination
View Publication ↗
|
⬇ PDF
|
Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2026-05-07 | NTC.PUB |
Notice of Publication | 1 | View | |
| 2026-02-03 | APP.FILE.REC |
Filing Receipt | 4 | View | |
| 2026-02-03 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2026-02-03 | WELCOME.LET |
Welcome Letter from USPTO Director and Deputy Director | 1 | View | |
| 2025-12-22 | SPEC |
Specification | — | View | |
| 2025-12-22 | DRW.SUPP |
Drawings-black and white line and/or other drawings | — | View | |
| 2025-12-22 | N417.PYMT |
Electronic Fee Payment | 2 | View | |
| 2025-12-22 | OATH |
Oath or Declaration filed | 5 | View | |
| 2025-12-22 | ADS |
Application Data Sheet | 10 | View | |
| 2025-12-22 | DRW.NONBW |
Drawings-other than black and white line drawings | 4 | View | |
| 2025-12-22 | SPEC |
Specification | 22 | View | |
| 2025-12-22 | CLM |
Claims | 4 | View | |
| 2025-12-22 | ABST |
Abstract | 1 | View | |
| 2025-12-22 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2025-12-22 | SCORE |
Placeholder sheet indicating presence of supplemental content in Supplemental Complex Repository for Examiners(SCORE) | 1 | View |
Inventors
Jianheng Li
Santa Clara, CA
Raymond Nicholas Vrtis
Carlsbad, CA
Robert Gordon Ridgeway
Chandler, AZ
Manchao Xiao
Carlsbad, CA
Xinjian Lei
Vista, CA
Attorneys & Agents of Record
Classification
USPC
427/578
H10P14/6682
C01B33/126
C23C16/401
C09D7/61
H10P14/6538
H10P14/6684
H10P14/6922
H10P14/6529
H10P14/6686
H10P14/6336
H10P14/665
H10P14/69215
C07F7/1896
C09D1/00
C23C16/045
C23C16/308
C23C16/325
C23C16/345
C23C16/50
C23C16/56
Prosecution
- Examiner
- CENTRAL, DOCKET
- Art Unit
- OPAP
- Customer No.
- 143749
- Docket No.
- 07979-DIV-US01
- Confirmation No.
- 1703
Publication
- Pub. No.
- US20260130142A1
- Pub. Date
- 2026-05-07
Parent
is a Division of
→
App. 17/586,405
· US 12,505,999
Filed 2022-01-27
· Patented Case
Parent
is a Division of
→
App. 16/580,880
· US 11,270,880
Filed 2019-09-24
· Patented Case
Parent
is a Division of
→
App. 15/681,102
· US 10,468,244
Filed 2017-08-18
· Patented Case
Parent
Claims priority from a provisional application
→
App. 62/381,222
Filed 2016-08-30
· Provisional Application Expired
No recorded assignments were found for this patent.
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
- App. No.
- 19/429,899
- Filed
- 2025-12-22
- Pub. No.
- US20260130142A1
- Examiner
- CENTRAL, DOCKET
- Art Unit
- OPAP
External Links