IP Library › Patent Application 62381222
Patent Application Provisional
App. No. 62/381,222 · Confirmation No. 9592

Precursors And Flowable CVD Methods For Making Low-K Films To Fill Surface Features

Provisional Application Expired
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2018-01-10 OATH Oath or Declaration filed 5 View
2017-06-28 N572 Response - Re: Informal Power of Attorney (PTOL-308) 2 View
2017-06-28 PEFN Pre-Exam Formalities Notice 1 View
2017-06-20 PA.. Power of Attorney 2 View
2017-06-20 TRAN.LET Transmittal Letter 1 View
2016-09-13 APP.FILE.REC Filing Receipt 3 View
2016-08-30 PD.TO.AUTH Authorization or Rescission of Authorization to Access Application by Digital Access Service /Priority Document Exchange Office 2 View
2016-08-30 TR.PROV Provisional Cover Sheet (SB16) 4 View
2016-08-30 WFEE Fee Worksheet (SB06) 2 View
2016-08-30 N417 Electronic Filing System Acknowledgment Receipt 3 View
2016-08-30 SPEC Specification 17 View
2016-08-30 CLM Claims 3 View
2016-08-30 ABST Abstract 1 View
2016-08-30 DRW Drawings-only black and white line drawings 2 View
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Quick Facts
App. No.
62/381,222
Filed
2016-08-30