IP Library › Patent Application 19446275
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App. No. 19/446,275 · Confirmation No. 4108

POLISHING COMPOSITION FOR SEMICONDUCTOR PROCESS AND SUBSTRATE POLISHING METHOD USING THE SAME

Inventors: Deoksu HAN, Sungmin LEE
Applicant: YCCHEM CO., LTD.
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Quick Facts
App. No.
19/446,275
Filed
2026-01-12
Pub. No.
US20260138230A1
Art Unit
OPAP