Granted Patent
S1
US 614,152 · App. 29/331,021 · Granted Apr 20, 2010
Substrate transfer device for semiconductor deposition apparatus
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Claims (1)
The ornamental design for a substrate transfer device for semiconductor deposition apparatus, as shown and described.
Assignments (2)
CHANGE OF NAME
Recorded Mar 21, 2019
From: ASM GENITECH KOREA, LTD.
To: ASM KOREA LTD.
Reel/Frame 048658/0249 →
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded Feb 9, 2009
From: LEE, JEONG HO; JEONG, SANG JIN; CHOI, YOUNG SEOK
To: ASM GENITECH KOREA LTD.
Reel/Frame 022236/0249 →