IP Library › Granted Patent US 614,593
Granted Patent S1
US 614,593 · App. 29/331,023 · Granted Apr 27, 2010

Substrate support for a semiconductor deposition apparatus

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Quick Facts
Patent No.
US 614,593
App. No.
29/331,023
Granted
Apr 27, 2010
Kind
S1
Claims (1)

The ornamental design for a substrate support for a semiconductor deposition apparatus, as shown and described.

Assignments (2)
CHANGE OF NAME Recorded Mar 21, 2019
From: ASM GENITECH KOREA, LTD.
To: ASM KOREA LTD.
Reel/Frame 048658/0249 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 9, 2009
From: LEE, JEONG HO; JEONG, SANG JIN; JUNG, DONG RAK
To: ASM GENITECH KOREA LTD.
Reel/Frame 022236/0244 →