Granted Patent
S1
US 831,085 · App. 29/606,718 · Granted Oct 16, 2018
Substrate processing unit
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Claims (1)
The ornamental design for a substrate processing unit, as shown and described.
Assignments (2)
CHANGE OF NAME AND ADDRESS
Recorded Mar 30, 2020
From: HITACHI HIGH-TECHNOLOGIES CORPORATION
To: HITACHI HIGH-TECH CORPORATION
Reel/Frame 052259/0227 →
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded Aug 16, 2017
From: SAKKA, YUSAKU; KAWASAKI, HIROMICHI
To: HITACHI HIGH-TECHNOLOGIES CORPORATION
Reel/Frame 043301/0607 →