IP Library › Granted Patent US 931,241
Granted Patent S1
US 931,241 · App. 29/703,658 · Granted Sep 21, 2021

Lower shield for a substrate processing chamber

Inventors: Sarath Babu (Singapore, SG); Ananthkrishna Jupudi (Singapore, SG); Yueh Sheng Ow (Singapore, SG); Junqi Wei (Singapore, SG); Kelvin Boh (Singapore, SG); Yuichi Wada (Chiba, JP); Kang Zhang (Singapore, SG)
Assignee: APPLIED MATERIALS, INC.
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Quick Facts
Patent No.
US 931,241
App. No.
29/703,658
Granted
Sep 21, 2021
Kind
S1
Claims (1)

The ornamental design for a lower shield for a substrate processing chamber, as shown and described.

Assignments (5)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 10, 2020
From: APPLIED MATERIALS SINGAPORE TECHNOLOGY PTE. LTD.
To: APPLIED MATERIALS, INC.
Reel/Frame 053444/0044 →
CORRECTIVE ASSIGNMENT TO CORRECT THE NAME OF INVENTOR ZHANG KANG PREVIOUSLY RECORDED ON REEL 050866 FRAME 0235. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT. Recorded Apr 9, 2020
From: BABU, SARATH; JUPUDI, ANANTHKRISHNA; OW, YUEH SHENG; WEI, JUNQI; BOH, KELVIN; ZHANG, KANG
To: APPLIED MATERIALS SINGAPORE TECHNOLOGY PTE. LTD.
Reel/Frame 052352/0191 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 30, 2019
From: WADA, YUICHI
To: APPLIED MATERIALS, INC.
Reel/Frame 050864/0424 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 30, 2019
From: BABU, SARATH; JUPUDI, ANANTHKRISHNA; OW, YUEH SHENG; WEI, JUNQI; BOH, KELVIN; KANG, ZHANG
To: APPLIED MATERIALS SINGAPORE TECHNOLOGY PTE. LTD.
Reel/Frame 050866/0235 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 6, 2019
From: WADA, YUICHI
To: APPLIED MATERIALS, INC.
Reel/Frame 050294/0307 →