IP Library › Granted Patent US 1,009,816
Granted Patent S1
US 1,009,816 · App. 29/805,681 · Granted Jan 2, 2024

Collimator for a physical vapor deposition chamber

Inventors: Martin Lee Riker (Round Rock, TX); Keith A. Miller (Mountain View, CA); Fuhong Zhang (San Jose, CA); Luke Vianney Varkey (Milpitas, CA); Kishor Kumar Kalathiparambil (Santa Clara, CA); Xiangjin Xie (Sunnyvale, CA)
Assignee: APPLIED MATERIALS, INC.
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Quick Facts
Patent No.
US 1,009,816
App. No.
29/805,681
Granted
Jan 2, 2024
Kind
S1
Claims (1)

We claim the ornamental design for a collimator for a physical vapor deposition chamber, as shown and described.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 23, 2021
From: XIE, XIANGJIN
To: APPLIED MATERIALS, INC.
Reel/Frame 057575/0719 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 13, 2021
From: RIKER, MARTIN LEE; MILLER, KEITH A.; ZHANG, FUHONG; VARKEY, LUKE VIANNEY; KALATHIPARAMBIL, KISHOR KUMAR
To: APPLIED MATERIALS, INC.
Reel/Frame 057459/0912 →