Granted Patent
S1
US 1,026,054 · App. 29/835,991 · Granted May 7, 2024
Collimator for a physical vapor deposition (PVD) chamber
Inventors:
Martin Lee Riker (Round Rock, TX); Keith A. Miller (Mountain View, CA); Luke Vianney Varkey (Milpitas, CA); Xiangjin Xie (Fremont, CA); Kishor Kumar Kalathiparambil (Santa Clara, CA)
Assignee:
APPLIED MATERIALS, INC.
View Patent ↗
Loading inventors, assignments & file history…
Claims (1)
We claim the ornamental design for a collimator for a physical vapor deposition (PVD) chamber, as shown and described.
Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded May 3, 2022
From: RIKER, MARTIN LEE; MILLER, KEITH A.; VARKEY, LUKE VIANNEY; XIE, XIANGJIN; KALATHIPARAMBIL, KISHOR KUMAR
To: APPLIED MATERIALS, INC.
Reel/Frame 059794/0634 →