IP Library Granted Patent US 1,019,581
Granted Patent S1
US 1,019,581 · App. 29/861,167 · Granted Mar 26, 2024

Inner tube of reaction tube for semiconductor manufacturing equipment

Inventor: Atsushi Hirano (Toyama, JP)
Assignee: KOKUSAI ELECTRIC CORPORATION
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Quick Facts
Patent No.
US 1,019,581
App. No.
29/861,167
Granted
Mar 26, 2024
Kind
S1
Claims (1)

I claim the ornamental design for an inner tube of reaction tube for semiconductor manufacturing equipment, as shown and described.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 30, 2022
From: HIRANO, ATSUSHI
To: KOKUSAI ELECTRIC CORPORATION
Reel/Frame 061928/0783 →
Priority Claims (1)
JP 2022-011409 D · May 30, 2022 · national