IP Library › Granted Patent US 1,026,839
Granted Patent S1
US 1,026,839 · App. 29/863,220 · Granted May 14, 2024

Collimator for a physical vapor deposition (PVD) chamber

Inventors: Martin Lee Riker (Round Rock, TX); Luke Vianney Varkey (Milpitas, CA); Xiangjin Xie (Fremont, CA)
Assignee: APPLIED MATERIALS, INC.
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Quick Facts
Patent No.
US 1,026,839
App. No.
29/863,220
Granted
May 14, 2024
Kind
S1
Claims (1)

The ornamental design for a collimator for a physical vapor deposition (PVD) chamber, as shown and described.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 2, 2023
From: RIKER, MARTIN LEE; VARKEY, LUKE VIANNEY; XIE, XIANGJIN
To: APPLIED MATERIALS, INC.
Reel/Frame 062252/0279 →