IP Library › Patent Application 60263671
Patent Application Provisional
App. No. 60/263,671 · Confirmation No. 4652

Electrically isolated, mechanically anchored metal MEMS beams

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2001-01-23 TRNA Transmittal of New Application 1 View
2001-01-23 SPEC Specification 3 View
2001-01-23 LET. Miscellaneous Incoming Letter 1 View
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Quick Facts
App. No.
60/263,671
Filed
2001-01-23