IP Library › Granted Patent US 6,674,614
Granted Patent Utility
US 6,674,614 · Confirmation No. 8288

METHOD OF FABRICATING ELECTRICALLY ISOLATED METAL MEMS BEAMS AND MICROACTUATOR INCORPORATING THE MEMS BEAM

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2007-05-16 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2005-06-08 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2005-04-15 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2003-11-12 IFEE Issue Fee Payment (PTO-85B) 2 View
2002-01-02 TRNA Transmittal of New Application 2 View
2002-01-02 ADS Application Data Sheet 2 View
2002-01-02 SPEC Specification 15 View
2002-01-02 CLM Claims 8 View
2002-01-02 ABST Abstract 1 View
2002-01-02 DRW Drawings-only black and white line drawings 11 View
2002-01-02 OATH Oath or Declaration filed 3 View
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Quick Facts
Patent No.
US 6,674,614
App. No.
10/037,679
Filed
2002-01-02
Granted
2004-01-06
Pub. No.
US20020097530A1
Art Unit
2652
PTA
0 days