IP Library › Patent Application 60263991
Patent Application Provisional
App. No. 60/263,991 · Confirmation No. 5944

Metal hard mask for ILD RIE in Cu damascene structure used for MRAM

Provisional Application Expired
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 Code Description Pages PDF
2001-01-24 TRNA Transmittal of New Application 2 View
2001-01-24 SPEC Specification 3 View
2001-01-24 DRW Drawings-only black and white line drawings 1 View
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Quick Facts
App. No.
60/263,991
Filed
2001-01-24