Granted Patent
Utility
US 6,440,753
· Confirmation No. 1234
METAL HARD MASK FOR ILD RIE PROCESSING OF SEMICONDUCTOR MEMORY DEVICES TO PREVENT OXIDATION OF CONDUCTIVE LINES
|
⬇ PDF
|
Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-08-27 | TRNA |
Transmittal of New Application | 2 | View | |
| 2001-08-27 | DRW |
Drawings-only black and white line drawings | 2 | View | |
| 2001-04-02 | TRNA |
Transmittal of New Application | 2 | View | |
| 2001-04-02 | SPEC |
Specification | 13 | View | |
| 2001-04-02 | CLM |
Claims | 5 | View | |
| 2001-04-02 | ABST |
Abstract | 1 | View | |
| 2001-04-02 | DRW |
Drawings-only black and white line drawings | 3 | View | |
| 2001-04-02 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Xian J. Ning
Mohegan Lake, NY
Joachim Nuetzel
Fishkill, NY
Attorneys & Agents of Record
Classification
USPC
438/3
H10P76/405
H10B61/00
B82Y10/00
Y10S438/945
Prosecution
- Examiner
- SMOOT, STEPHEN W
- Art Unit
- 2813
- Customer No.
- 25962
- Docket No.
- INF 01P7418
- Confirmation No.
- 1234
Publication
- Pub. No.
- US20020098676A1
- Pub. Date
- 2002-07-25
Patent Term Adjustment
0days
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2020-02-12
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2015-10-07
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2010-01-13
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
- Patent No.
- US 6,440,753
- App. No.
- 09/824,596
- Filed
- 2001-04-02
- Granted
- 2002-08-27
- Pub. No.
- US20020098676A1
- Examiner
- SMOOT, STEPHEN W
- Art Unit
- 2813
- PTA
- 0 days
External Links