IP Library Granted Patent US 6,440,753
Granted Patent Utility
US 6,440,753 · Confirmation No. 1234

METAL HARD MASK FOR ILD RIE PROCESSING OF SEMICONDUCTOR MEMORY DEVICES TO PREVENT OXIDATION OF CONDUCTIVE LINES

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Code Description Pages PDF
2001-08-27 TRNA Transmittal of New Application 2 View
2001-08-27 DRW Drawings-only black and white line drawings 2 View
2001-04-02 TRNA Transmittal of New Application 2 View
2001-04-02 SPEC Specification 13 View
2001-04-02 CLM Claims 5 View
2001-04-02 ABST Abstract 1 View
2001-04-02 DRW Drawings-only black and white line drawings 3 View
2001-04-02 OATH Oath or Declaration filed 2 View
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Quick Facts
Patent No.
US 6,440,753
App. No.
09/824,596
Filed
2001-04-02
Granted
2002-08-27
Pub. No.
US20020098676A1
Art Unit
2813
PTA
0 days