Patent Application
Provisional
App. No. 60/278,107
· Confirmation No. 5951
Method for shallow trench isolation with removal of strained island edges
Provisional Application Expired
Inventors
Philip Fisher
Foster City, CA
Darin A. Chan
Campell, CA
Attorneys & Agents of Record
Prosecution
- Docket No.
- F0562
- Confirmation No.
- 5951
AFFIRMATION OF PATENT ASSIGNMENT
Recorded 2009-08-18
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Quick Facts
- App. No.
- 60/278,107
- Filed
- 2001-03-23
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