IP Library › Patent Application 60285152
Patent Application Provisional Small
App. No. 60/285,152 · Confirmation No. 6396

Wet + dry etching process on <110> silicon and resulting structures

Inventor: Dan A. Steinberg
Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2001-04-20 TRNA Transmittal of New Application 1 View
2001-04-20 SPEC Specification 14 View
2001-04-20 LET. Miscellaneous Incoming Letter 1 View
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Quick Facts
App. No.
60/285,152
Filed
2001-04-20