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App. No. 10/124,612 · Confirmation No. 8997

Wet and dry etching process on <110> silicon and resulting structures

Inventor: Dan A. Steinberg
Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2009-04-29 EXIN Examiner Interview Summary Record (PTOL - 413) 2 View
2009-04-29 ABN Abandonment 1 View
2008-10-17 CTNF Non-Final Rejection 11 View
2008-10-17 892 List of references cited by examiner 1 View
2008-10-17 SRFW Search information including classification, databases and other search related notes 1 View
2008-10-17 SRNT Examiner's search strategy and results 4 View
2008-10-14 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2008-10-14 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2008-10-14 EXIN Examiner Interview Summary Record (PTOL - 413) 2 View
2008-10-01 PA.. Power of Attorney 2 View
2008-10-01 N417 Electronic Filing System Acknowledgment Receipt 2 View
2008-07-10 CTFR Final Rejection 6 View
2008-04-10 A... Amendment/Request for Reconsideration-After Non-Final Rejection 6 View
2008-04-10 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2008-01-10 CTNF Non-Final Rejection 5 View
2007-12-04 RCEX Request for Continued Examination (RCE) 3 View
2007-12-04 WFEE Fee Worksheet (SB06) 1 View
2007-11-21 CTAV Advisory Action (PTOL-303) 3 View
2007-11-21 EXIN Examiner Interview Summary Record (PTOL - 413) 2 View
2007-11-14 LET. Miscellaneous Incoming Letter 3 View
2007-11-06 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 2 View
2007-11-06 CLM Claims 2 View
2007-11-06 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2007-11-06 WFEE Fee Worksheet (SB06) 1 View
2007-09-07 CTFR Final Rejection 7 View
2007-06-21 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2007-06-21 CLM Claims 2 View
2007-06-21 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2007-06-21 LET. Miscellaneous Incoming Letter 1 View
2007-06-21 WFEE Fee Worksheet (SB06) 1 View
2007-03-22 CTNF Non-Final Rejection 6 View
2006-12-26 RCEX Request for Continued Examination (RCE) 2 View
2006-12-26 WFEE Fee Worksheet (SB06) 1 View
2006-12-15 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2006-12-11 CTAV Advisory Action (PTOL-303) 2 View
2006-12-11 CLM Claims 1 View
2006-11-27 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 6 View
2006-11-27 CLM Claims 2 View
2006-11-27 REM Applicant Arguments/Remarks Made in an Amendment 8 View
2006-11-27 WFEE Fee Worksheet (SB06) 1 View
2006-11-21 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2006-09-22 CTFR Final Rejection 8 View
2006-09-22 1449 List of References cited by applicant and considered by examiner 4 View
2006-07-11 WFEE Fee Worksheet (SB06) 1 View
2006-07-10 A... Amendment/Request for Reconsideration-After Non-Final Rejection 5 View
2006-07-10 CLM Claims 2 View
2006-07-10 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2006-06-12 IDS Information Disclosure Statement (IDS) Form (SB08) 7 View
2006-06-12 FOR Foreign Reference 62 View
2006-06-05 NTC.A.NONCPL Notice to the applicant regarding a non-compliant or non-responsive amendment 2 View
2006-05-26 A.I. Informal or Non-Responsive Amendment 6 View
2006-05-26 CLM.NE Claim-Amendment Not Entered 2 View
2006-05-26 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2006-05-26 136A Authorization for Extension of Time all replies 6 View
2006-05-26 WFEE Fee Worksheet (SB06) 1 View
2006-01-26 CTNF Non-Final Rejection 5 View
2006-01-26 1449 List of References cited by applicant and considered by examiner 1 View
2006-01-26 892 List of references cited by examiner 1 View
2006-01-26 SRFW Search information including classification, databases and other search related notes 1 View
2006-01-23 SRNT Examiner's search strategy and results 1 View
2005-12-22 ELC. Response to Election / Restriction Filed 3 View
2005-09-27 CTRS Requirement for Restriction/Election 4 View
2005-09-27 BIB Bibliographic Data Sheet 1 View
2005-03-31 C.AD Change of Address 1 View
2004-08-16 CTMS Miscellaneous Action with shortened statutory period (SSP) 3 View
2004-08-16 EXIN Examiner Interview Summary Record (PTOL - 413) 2 View
2004-07-15 PETDEC Petition Decision 1 View
2004-06-14 PET. Petition Entered 6 View
2004-06-14 LET. Miscellaneous Incoming Letter 1 View
2004-06-14 DRW Drawings-only black and white line drawings 12 View
2004-05-26 CTMS Miscellaneous Action with shortened statutory period (SSP) 3 View
2004-05-26 EXIN Examiner Interview Summary Record (PTOL - 413) 2 View
2004-05-19 C.AD Change of Address 1 View
2004-03-29 CTRS Requirement for Restriction/Election 4 View
2004-03-23 PETDEC Petition Decision 5 View
2003-04-09 PA.. Power of Attorney 1 View
2003-04-09 CTMS Miscellaneous Action with shortened statutory period (SSP) 1 View
2003-02-11 PA.. Power of Attorney 6 View
2002-09-19 CTMS Miscellaneous Action with shortened statutory period (SSP) 1 View
2002-08-28 XT/ Extension of Time 2 View
2002-08-28 PET. Petition Entered 2 View
2002-08-28 TRNA Transmittal of New Application 4 View
2002-08-28 DRW Drawings-only black and white line drawings 12 View
2002-08-28 LET. Miscellaneous Incoming Letter 1 View
2002-06-05 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2002-05-25 CTMS Miscellaneous Action with shortened statutory period (SSP) 2 View
2002-04-17 WFEE Fee Worksheet (SB06) 1 View
2002-04-17 WCLM Claims Worksheet (PTO-2022) 1 View
2002-04-17 TRNA Transmittal of New Application 2 View
2002-04-17 SPEC Specification 14 View
2002-04-17 CLM Claims 6 View
2002-04-17 ABST Abstract 1 View
2002-04-17 DRW Drawings-only black and white line drawings 12 View
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Quick Facts
App. No.
10/124,612
Filed
2002-04-17
Pub. No.
US20020195417A1
Art Unit
1792