Patent Application
Provisional
App. No. 60/287,028
· Confirmation No. 9018
Method and apparatus for detecting breakdown in ultra thin dielectric layers
Provisional Application Expired
Inventors
Philippe Roussel
Linden-Lubbeek, BELGIUM
Robin Degraeve
Gent, BELGIUM
Geert Van den Bosch
Gent, BELGIUM
Attorneys & Agents of Record
Prosecution
- Customer No.
- 20306
- Docket No.
- 01-499
- Confirmation No.
- 9018
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 60/287,028
- Filed
- 2001-04-27
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