Patent Application
Provisional
App. No. 60/296,947
· Confirmation No. 1089
High power excimer or molecular fluorine laser system
Provisional Application Expired
Inventors
Rustem Osmanow
Rosdort, GERMANY
Juergen Baumler
Osterode, GERMANY
Thomas Schroeder
Goettingen, GERMANY
Attorneys & Agents of Record
Prosecution
- Customer No.
- 28661
- Docket No.
- IMPY-16200
- Confirmation No.
- 1089
Child
Claims priority from a provisional application
→
App. 10/163,098
· US 6,768,765
Filed 2002-06-04
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
Claims priority from a provisional application
→
App. 10/163,097
Filed 2002-06-04
· Abandoned -- Failure to Respond to an Office Action
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 60/296,947
- Filed
- 2001-06-07
External Links