Perimeter seal for backside cooling of substrates

Inventor: Mark D. Kenney

Provisional Application Expired

	Code	Description	Pages	PDF
2001-07-30	`TRNA`	Transmittal of New Application	2	View
2001-07-30	`SPEC`	Specification	7	View
2001-07-30	`CLM`	Claims	2	View
2001-07-30	`DRW`	Drawings-only black and white line drawings	1	View

Inventors

Mark D. Kenney Safety Harbor, FL

Attorneys & Agents of Record

STEFAN STEIN Reg. 29702 Attorney · GRAY ROBINSON, P.A.

MICHAEL COLITZ Reg. 37010 Attorney · GRAY ROBINSON, P.A.

HARVEY KAUGET Reg. 41108 Attorney · BURR & FORMAN, LLP

ANDERSON BALDY Reg. 40496 Attorney · HOLLAND AND KNIGHT LLP

Prosecution

UNAXIS USA, INC.

from KENNEY, MARK D.

ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded 2001-08-30

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