PERIMETER SEAL FOR BACKSIDE COOLING OF SUBSTRATES

Download Selected Clear

⬇ PDF	Date ▼	Code	Description	Pages	PDF
	2022-06-28	OATH	Oath or Declaration filed	18	View
	2021-11-23	OATH	Oath or Declaration filed	15	View
	2021-11-23	OATH	Oath or Declaration filed	15	View
	2020-05-15	OATH	Oath or Declaration filed	14	View
	2020-05-15	OATH	Oath or Declaration filed	14	View
	2016-09-13	OATH	Oath or Declaration filed	13	View
	2015-07-30	OATH	Oath or Declaration filed	9	View
	2015-04-28	OATH	Oath or Declaration filed	9	View
	2013-04-19	C.AD	Change of Address	1	View
	2013-04-19	N417	Electronic Filing System Acknowledgment Receipt	2	View
	2004-04-28	NOA	Notice of Allowance and Fees Due (PTOL-85)	2	View
	2004-04-28	1449	List of References cited by applicant and considered by examiner	2	View
	2004-04-28	892	List of references cited by examiner	1	View
	2004-04-13	IFEE	Issue Fee Payment (PTO-85B)	3	View
	2004-03-31	RUSH	Printer Query form, used by the publications branch	1	View
	2004-03-31	XRUSH	Internal Response to Printer Query from Technology Center(TC)	1	View
	2004-02-27	WFEE	Fee Worksheet (SB06)	1	View
	2004-02-27	FWCLM	Index of Claims	1	View
	2004-02-25	NOA	Notice of Allowance and Fees Due (PTOL-85)	6	View
	2004-02-25	IIFW	Issue Information including classification, examiner, name, claim, renumbering, etc.	1	View
	2004-02-25	SRFW	Search information including classification, databases and other search related notes	1	View
	2003-12-31	A...	Amendment/Request for Reconsideration-After Non-Final Rejection	3	View
	2003-12-31	CLM	Claims	4	View
	2003-12-31	REM	Applicant Arguments/Remarks Made in an Amendment	3	View
	2002-06-06	TRNA	Transmittal of New Application	3	View
	2002-06-06	SPEC	Specification	15	View
	2002-06-06	CLM	Claims	8	View
	2002-06-06	ABST	Abstract	1	View
	2002-06-06	DRW	Drawings-only black and white line drawings	5	View
	2002-06-06	OATH	Oath or Declaration filed	4	View

Parent Claims priority from a provisional application

→

App. 60/308,734

Filed 2001-07-30 · Provisional Application Expired

Child PCT is a Continuation of

→

PCT/US2002/022359

Filed 2002-07-15 · PCT - IPER (International Preliminary Examination Report) 409-416 Mailed