Enhanced ion beam etch selectivity of magnetic thin films using carbon-based gases

Inventors: Mark W. Covington, Michael A. Seigler, Eric W. Singleton, Michael K. Minor

Provisional Application Expired

	Code	Description	Pages	PDF
2001-08-21	`TRNA`	Transmittal of New Application	1	View
2001-08-21	`SPEC`	Specification	5	View
2001-08-21	`DRW`	Drawings-only black and white line drawings	4	View

Inventors

Mark W. Covington Pittsburgh, PA

Michael A. Seigler Pittsburgh, PA

Eric W. Singleton Greenfield, MN

Michael K. Minor Gibsonia, PA

Attorneys & Agents of Record

CAROL BORDAS Reg. 37284 Attorney · BORDAS LOUTZENHISER & ASSOCIATES, LLC

Prosecution

No recorded assignments were found for this patent.

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