IP Library › Patent Application 60317699
Patent Application Provisional
App. No. 60/317,699 · Confirmation No. 6472

PMGI as undercoat dissolution thin layer for electron beam lithography of sub-100 nm narrow trenches

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2001-09-06 TRNA Transmittal of New Application 1 View
2001-09-06 SPEC Specification 6 View
2001-09-06 LET. Miscellaneous Incoming Letter 1 View
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Quick Facts
App. No.
60/317,699
Filed
2001-09-06