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App. No. 10/108,309 · Confirmation No. 3910

ELECTRON BEAM LITHOGRAPHY METHOD FOR PLATING SUB-100 NM TRENCHES

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2004-09-29 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-07-28 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-07-28 NOA Notice of Allowance and Fees Due (PTOL-85) 2 View
2004-07-28 1449 List of References cited by applicant and considered by examiner 2 View
2004-07-28 FWCLM Index of Claims 1 View
2004-07-28 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-07-28 SRFW Search information including classification, databases and other search related notes 1 View
2003-09-16 WFEE Fee Worksheet (SB06) 1 View
2003-07-24 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2003-07-24 CLM Claims 4 View
2003-07-24 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2003-04-23 CTNF Non-Final Rejection 6 View
2003-04-23 892 List of references cited by examiner 1 View
2003-04-19 SRNT Examiner's search strategy and results 5 View
2003-03-19 SRNT Examiner's search strategy and results 13 View
2002-09-11 LET. Miscellaneous Incoming Letter 2 View
2002-09-11 ADS Application Data Sheet 2 View
2002-05-30 CTMS Miscellaneous Action with shortened statutory period (SSP) 1 View
2002-03-28 TRNA Transmittal of New Application 3 View
2002-03-28 SPEC Specification 13 View
2002-03-28 CLM Claims 4 View
2002-03-28 ABST Abstract 1 View
2002-03-28 DRW Drawings-only black and white line drawings 8 View
2002-03-28 OATH Oath or Declaration filed 4 View
2002-03-28 LET. Miscellaneous Incoming Letter 1 View
2002-03-28 TRNA Transmittal of New Application 3 View
2002-03-28 SPEC Specification 13 View
2002-03-28 CLM Claims 4 View
2002-03-28 ABST Abstract 1 View
2002-03-28 DRW Drawings-only black and white line drawings 8 View
2002-03-28 OATH Oath or Declaration filed 4 View
2002-03-28 WFEE Fee Worksheet (SB06) 1 View
2002-03-28 WFEE Fee Worksheet (SB06) 1 View
2002-03-28 WCLM Claims Worksheet (PTO-2022) 1 View
2002-03-28 FWCLM Index of Claims 1 View
2002-03-28 SRFW Search information including classification, databases and other search related notes 1 View
2002-03-28 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2002-03-28 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
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Quick Facts
App. No.
10/108,309
Filed
2002-03-28
Granted
2004-11-09
Pub. No.
US20030045110A1
Art Unit
2818
PTA
-1 days