Patent Application
Provisional
App. No. 60/346,005
· Confirmation No. 2050
Massively parallel ALD/CVD system
Provisional Application Expired
Inventors
Thomas E. Seidel
Sunnyvale, CA
Adrian Jansz
Sunnyvale, CA
Mike DeMartini
Sunnyvale, CA
Ken Doering
Sunnyvale, CA
Attorneys & Agents of Record
Prosecution
- Docket No.
- 2344-739
- Confirmation No.
- 2050
Child
PCT
Claims priority from a provisional application
→
PCT/US2002/034714
Filed 2002-10-29
· PCT - IPER (International Preliminary Examination Report) 409-416 Mailed
Child
Claims priority from a provisional application
→
App. 10/282,609
· US 6,902,624
Filed 2002-10-29
· Patented Case
Child
Claims priority from a provisional application
→
App. 11/114,313
Filed 2005-04-25
· Abandoned -- Failure to Respond to an Office Action
Child
Claims priority from a provisional application
→
App. 11/115,053
Filed 2005-04-25
· Abandoned -- Failure to Respond to an Office Action
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Quick Facts
- App. No.
- 60/346,005
- Filed
- 2001-10-29
External Links