IP Library › Patent Application 60361799
Patent Application Provisional Small
App. No. 60/361,799 · Confirmation No. 8037

Optical method and apparatus for inspecting large area micro-electronic substrates

Provisional Application Expired
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 Code Description Pages PDF
2002-03-05 TRNA Transmittal of New Application 2 View
2002-03-05 SPEC Specification 66 View
2002-03-05 CLM Claims 19 View
2002-03-05 ABST Abstract 1 View
2002-03-05 DRW Drawings-only black and white line drawings 20 View
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Quick Facts
App. No.
60/361,799
Filed
2002-03-05